Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

MB

30 Rod end nut (Standard) Knuckle joint pin Clevis pin 2-d d Dd9 D C L l m H B Note 1) d (Through hole diameter) Bore size (mm) Clevis Knuckle Part no.

RB/RBL/RBQ

weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh R m RHC m 2 1 2 m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G

Floating Joint/Stainless Steel Type Series JS

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

PF2A/PF2W

(500 VDC) between external terminal and case 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

53

Page 145 137 B Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic fluid fill function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method

HRX-OM-W002

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

CC

S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

ZCUK

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

Compressed Air Preparation Filter

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2