RB/RBL/RBQ

S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

Air Cylinder RSQ Series Stopper Cylinder

lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!

FSQ seies

lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!

240

8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

energy saving effect

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 163 C O N T E N T S HRSH Series Inverter Type HRS HRS

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

GA342

8.4 NO X X PE NC 30.5 30.5 116.1 98.6 91.6 91.6 2(A) 3(R) 66.8 57.6 1(P) 43.8 43.8 34 34 71 (P port) Rc 1/2, 3/4, 1 (R port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 5-5-12

Digital Flow Switches, Series PF2A, Series PF2W

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

Booster Regulator/Air Tank

(t) is given by the graph. Then, the charge time (T) for a 100 L tank: With the pressure increase ratio from 2.0 to 3.0, the charge time of 147 58 = 89 sec. (t) is given by the graph. Then, the charge time (T) for a 10 L tank: T = t x = 3.2 x = 32 (s). V 10 T = t x = 89 x = 89 (s).

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Multistage Ejector Series ZL112/212 1

End plate e Body r Vacuum sensor unit t Nozzle y Diffuser u Other than vacuum switch P397110 Detent plug i Vacuum switch specifications P397176 Lead wire cover 13-7-11 12 Series ZL Dimensions: Series ZL212 Pressure supply port Rc 1/8 Vacuum port Rc 3/4 Exhaust port 76 P Standard ZL212 40 V 54 125 Label 188 61 P Port exhaust ZL212P V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

MRQ

The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1013)/t /min(ANR) V: Inner volume = cm3 P: Absolute pressure = {Operating pressure (MPa) + 0.1013} t: Operating time = s CRB1 Calculate the required air volume separately for the linear motion part and the rotary motion part.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: Operation Manual, Calibration Certificate