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a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a , a a a a a a a The use of compact spacer w th bracket reduces the lotal assembled space X lmproved f low characteristics X Built-in gauges Model Beduction New old \mm) X Easier assembly AC10 AC1000 4 AC20 AC2000 14 AC25 AC2s00 1 4 AC30 AC3000 AC40 AC4000 1 4 '18 X lmproved ozone resistance I Larger bowl capacities S lmproved

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Fieldbus system PROFIBUS DP compatible SI unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 2 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tithe screw (4x14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

SMC Wireless System PROFINET compatible

EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. EX600-ZMA3 (Specialized for the SY series) Enclosed parts: Round head screw with washer (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. 2. Valve Plate EX600-ZMV1 Enclosed parts: Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs.

Series IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 0m (0ft) 20C (-4F) 1m (3.3ft) 19 C (-2.2F) 3m (9.8ft) 17 C (1.4F) 5m (16ft) 16 C (3.2F) Note) In case of models other than the above, the outlet air atmospheric pressure dew point will increase by 1C (34F) or less for tubing lengths of 5m (16ft) or less. 3 4 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 15C (5F) Specifications How to Order

4-channel Flow Monitor ( compatible)

seal Panel mount adapter + Front protective cover ZS-26-C With set screw M3 x 8L (2 pcs.) and waterproof seal Front protective cover ZS-26-01 -8No.PF-OMA1011-A Summary of Product parts Names of individual parts Operation light (Orange): Lit when OUT is ON.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Accessories to supply valve/ release valve Model Accessories ZB1-VQ110UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ110U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110LMounting screws (M1.7 x 22); 2pcs. ZB1-VQ120UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ120U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110Mounting screws (M1.7 x 15); 2pcs.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

With Factory Installed

( 01, -02 and -03 after model no. means port size{01 1/8,02' 114,03 3/8,04 1/2} 5 Filter I Regulator Series AW e How to Order AW 01 Filte~ Regulator '-Optional specifications 0.02~0.2MPa 1 (0.2 ~ 2.0kgf/cm2) setting Accessory (optional) 20 1/8 Type of thread Body size _-1 2 Metal bowl 6 Nylon bowl Description Applicable model Symbol 8 Metal bowl with level gauge ~ ~ ~ ( pn 0 (Only AW3001

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Air Catch Sensor

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

VCL

1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

VCS

1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2+ 3 stns. 2 stns. + 3 stns x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Dimensions (mm) Electrical entry J E H C G B D Z A Grommet: G Conduit: C Conduit terminal: T Model Y X N T S R Q VV2CS2 77 99 66 41.5 44 50.5 22 34.5 4.5 17.3 24.5 38 20 28 56 49 VV2CS3 86.5 101 68 51 45.5 60 24 38.5 5.5 19.3 28.5 42 25.5 30 66 57 VV2CS4

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SX3000-38-2A Port size Port size M5 x 0.8 SX3000 M5 x 0.8 SX3000 SX5000 1 8 Note) The EXH port may be either on the lead wire side or on the end plate side. SX5000-38-16A SX5000 1 8 Note) SUP port may be either on the lead wire side or the end plate side. (Factory assembled spacer will be shipped with the orientation shown in the figure.)

EtherNet/IP TM Compatible Fieldbus System

Service Class Inst Attr ID Values ID ID Reset 01 h [Identity Object] 1 h 01 (Type1 reset) 37 No.EX-OMS0014-A < Properties tab > Network information including the GW unit MAC address and communication speed are displayed. 38 No.EX-OMS0014-A Specification Specifications Basic Specifications Item Specifications Power supply voltage range Power supply for input and control: 24 VDC 10% Power

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Flow rate (L/min (ANR)) Inlet pressure (MPa) 688 Regulator with Mist Separator AMR3000 to 6000 Series Dimensions AMR4000/5000/6000 M N H ARJ E AR425 to 935 G D ARX F 2 x V 2 x V AMR AMR AMR3000 R A Compact pressure switch ARM (Option) S Bracket ARP Adapter assembly (Option) T IR-A B J B L P C K PT elbow IR 2 x U IRV VEX SRH SRP

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When usmg other brand fittmgs apply the helium teak test at the wetded section Carbon diOXide v Ammonia '~) ArgOf'l ~ Nitrogen gas -" Chlorine gas x Parts List No. Descriolion--: Material Voltage Resistance Voltage resistance between metal fitting and lead wire 01 the swilch is 2S0V. Do nol apply voltage potential In excess of 250V.

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N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .