High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-02-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 32 (33) AS33l1FG-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS43l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

LECA6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Series KV2 Fittings

-35S KV2Y07-34S KV2Y07-35S KV2Y07-36S KV2Y11-07-35S KV2Y11-07-36S KV2Y11-35S KV2Y11-36S KV2Y11-37S KV2Y13-07-37S KV2Y13-11-36S KV2Y13-11-37S KV2Y13-35S KV2Y13-36S KV2Y13-37S KV2Y15-37S 14.29 14.29 14.29 14.29 19.00 14.29 14.29 17.46 19.00 19.00 19.00 19.00 22.23 23.80 23.80 22.23 19.00 19.00 22.23 23.80 13.2 13.2 13.2 13.2 17.9 13.2 13.2 13.2 17.9 17.9 17.9 17.9 17.9 21.7 21.7 21.7 21.7 21.7

HRX-OM-M090

HRS Series HRX-OM-M090 Contents 9.5.1 HRS012--10,HRS018--10 . 9-11 9.5.2 HRS012--20,HRS018--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012

CRBB-OM00004

Adjustment method 6 3.1 Vertical auto switch unit 6 Operating Range and Hysteresis 6 Auto Switch Mounting 7 Auto Switch Adjustment 10 3.2 Angle adjustment unit 11 Rotating angle with angle adjustment unit 11 Rotating Angle Adjustment Method 11 4.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Description Material 1 Bracket Steel strip 2 Cross recessed round head screw Steel wire 3 Clasp Steel strip 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR 12 Bonnet A POM 13 Bonnet B POM 14 Gear PPS 15 Indicator gear POM 16 Clip Stainless steel 1 The AS3002FS-11, AS4002FS-11, AS4002FS-13 are made of stainless steel. 9 Related Equipment Holder for Speed Controller TMH Series Specifications

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

EXxx-OMW0014CN

(EX245-DX1EX245-DY1EX245-LA1/LB1) 1 88 EX600-ZT1 . 11-1 (EX600-ZT1) 74 No.EX-OMW0014CN-A 11.2. Y Y (EX245-DX1EX245-DY1) Y 2 2M12M12 2M8M12 PCA-1557785 Y (2M12M12) A code() A code() A code() . 11-2 Y (PCA-1557785) 75 No.EX-OMW0014CN-A PCA-1557798 Y (2M8M12) A code() . 11-3 Y (PCA-1557798) 76 No.EX-OMW0014CN-A 11.3.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

4/5 Port Air Operated Valve Series SYJA3000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.