Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKMT (A + K + M + T)
Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Bore Size: 20mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Action: T (Single Acting, Spring Extend), Body Option: Standard (Rod End Female Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9PAV--Solid State, Water Resist., 3 Wire
Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KMT (K + M + T)
Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Bore Size: 25mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Action: T (Single Acting, Spring Extend), Body Option: Standard (Rod End Female Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9BV--Solid State , Gen.
Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Bore Size: 25mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Action: T (Single Acting, Spring Extend), Body Option: Standard (Rod End Female Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor)
Series: NCDA1 (Standard w/ Magnet), Mounting: T (MT4, Center trunnion), Bore Size: 150 (1 1/2"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: F (Flanged), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: A (10m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card
AS-FPQ/AS-FPG ASF Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.
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3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure
Description Material Part number 4 Valve Stainless steel/NBR 1349173-5 Rc (NPT)1/8, 1/4 Gauge port size Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.
2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.