SMC Corporation of America
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System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

Body, Exhaust Type: G (Single Unit - High-noise Reduction Silencer Exhaust), Nominal Nozzle Size: 15 (ø1.5), Air Operated: Q1 (Air Operated, Supply Valve; N.C; Release Valve: N.C.), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: Y (For Pressure Switch for Vacuum: 2m Lead Wire w/Connector; Pressure Sensor Assembly: 3m w/Lead Wire), Vacuum,

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Body/Exhaust Type: G (Single Unit - High-noise Reduction Silencer Exhaust), Nominal Nozzle Size: 12 (ø1.2), Supply Valve and Release Valve: R (Self-holding Release Valve Linked / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector

Body, Exhaust Type: G (Single Unit - High-noise Reduction Silencer Exhaust), Nominal Nozzle Size: 15 (ø1.5), Air Operated: Q1 (Air Operated, Supply Valve; N.C; Release Valve: N.C.), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: Y (For Pressure Switch for Vacuum: 2m Lead Wire w/Connector; Pressure Sensor Assembly: 3m w/Lead Wire), Vacuum,

Stations: 10 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female Thread Specification (M3)], 1st

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

End of report 7 Doc.No.DIT-69900-OM005-E Revision E: Correction concerning communication data, Product ID addition and correction by software modification. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

When removing the product from the application, be sure to confirm that the safety measures are taken, and shut off the compressed air supply and the power supply before removing the product. 30 - Document No.ZL-OM01001-A Revision history Edition AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

Part number of auto switch mounting bracket 28 Revision history Initial release : 2012/5/21 Revision 1 : 2014/1/30 Add the air cushion. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

Loosening of connection Replace Bonnet ASSY Air Leakage of Bonnet ASSY Wear of piston sea Replace Bonnet ASSY 11 - 12 - 13 - 14 - 15 - 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

ZH-OM00401 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 20 -

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

. : No data is available. 13 - Revision history A : Fluid N2 Turbine oil class1 (ISO VG32) add Applicable Tubing : TUZ add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 48 Series LECP2 Dimensions Screw mounting (LEC2-) 38 36.2 85 4.5 For body mounting 18.1 1.2 4.5 110 101 86 4.5 For body mounting CN4 I/O connector CN3 Encoder connector CN2 Motor connector CN1 Power supply connector DIN rail mounting (LEC2D-) 38 36.2 85 (11.5) SL 24.2 35 127.3

SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) Absolute Controller LECP7-XB3 Series SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, 101-0021, JAPAN URL: http://www.smcworld.com Return to origin not required after power is OFF/Shorten equipment recovery time The current actuator position can be monitored even if the power of the battery is shutoff The position

screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101

SP158X-002E P: TS P.G.Information (Specialized Product) SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, TOKYO 101-0021, JAPAN URL: http://www.smcworld.com Liquid Dispense Pump (Solenoid type) Series LSP Features Compact solenoid type diaphragm pump, which dispenses fixed amount of liquid from 5L to 200L each time it is operated.

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power