MXH Series Compact Slide

4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 9 4-M4 x 0.7 Depth 10 4-M4 x 0.7 Depth 6 2-M5 x 0.8 9 5.5 17 21.5 52.5 53.5 25 25 27 5.5 26 27 6.5 6.5 16 17 5 NS 10 12.5 25 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke Stroke (mm) LT NS LB J LA 5 58 20 4 10 10 58 20 10 4 15 68 30 20 4 20 68 30 4 20 25 78 40 4 30 30 78 40 30 4 40 88

Compact Cylinder/Guide Rod Type Series CQM

x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 110L x 135L M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 115L x 140L M6 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Compact Cylinder with Solenoid Valve/

CQM CVQM C B Tap mounting A Through-hole mounting (mm) C B A Bore size 32 9.5 59 49.5 40 10 57 67 12 71 83 50 13 97 84 63 Features 1 Compact Cylinder with Solenoid Valve/ Guide Rod Type 32, 40, 50, 63 Series CVQM How to Order CVQM 32 30 M9BW 5 M Port thread type 32 40 Bore size 32 40 50 63 M5 x 0.8 Nil 32 mm 40 mm 50 mm 63 mm Rc G NPT 50 63 F N Piping Nil P Standard Axial Cylinder stroke

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

100-01-A22 843 231 HEP Related How to Order Equipment ZPT 40 HB N J 25 B01 A18 Pad diameter (mm) Mounting thread Tightening torque (N m) 40 40 A18 Mounting thread dia.

Compact Guide Cylinder

R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

42

Nil Side ported B Bottom ported 493 VQ5000 Series Dimensions: Plug-in Type Conduit terminal 2-position single: VQ510 0 1 194.8 2 2 195 105.8 59.5 73 121.8 73 59.5 27.5 27.5 4(A) port 17.5 13.5 2(B) port 10.0 M5 x 0.8 Ground screw 3/8" 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 35 53 2 x 6.5 Mounting hole Manual override 35

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Passage: 21 (Common SUP, Individual EXH), Stations: 4 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 12 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 2 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 3 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 8 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 9 Stations

Passage: 21 (Common SUP, Individual EXH), Stations: 3 Stations

Passage: 21 (Common SUP, Individual EXH), Stations: 8 Stations