Modular Type Lubricators Series AL

Note 5) : For thread type: M5 and NPT only 508 Lubricator Series AL10 to AL60 Standard Specifications AL10 M5 x 0.8 AL20 1/8, 1/4 AL30 1/4, 3/8 AL40 1/4, 3/8, 1/2 AL40-06 3/4 AL50 3/4, 1 AL60 1 Model Port size Fluid Proof pressure Maximum operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 5 to 60C (with no freezing) AC-A AF-A 1/4: 30 3/8: 40 1/2: 50 50 Minimum dripping flow

Digital Flow Switch (Integrated display type) ( compatible)

: L Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 -1 10-1 Minimum Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 5 105 Maximum Maximum 6 106 Maximum Maximum Maximum : Unit setting: G Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 Minimum -1 10-1 Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 Maximum 5 105 Maximum

Mist Separator

Standard Specifications Model AFM20-D AFM30-D AFM40-D AFM40-06-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Air Fluid -5 to 60 C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating pressure 0.05 MPa Min. operating 0.15 MPa N.C. 0.1 MPa pressure of auto 0.1 MPa N.O.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

Micro Mist Separator

Standard Specifications Model AFD20-D AFD30-D AFD40-D AFD40-06-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Fluid Air -5 to 60 C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating pressure 0.05 MPa Min. operating 0.15 MPa N.C. 0.1 MPa pressure of auto 0.1 MPa N.O.

MY1

impact: P = 0.5MPa For 40 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 Impact speed (mm/s) Impact speed (mm/s) L-unit 1000 1000 Air cushion 500 400 300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

HRL

c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example (Example 2) Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !

Fieldbus system EtherNet/IP TM compatible SI unit

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 byte/1 channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 byte/1 channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 byte/1 channel) 4 (2

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

IDX-OM-W031

. 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly . 4 2 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Table of Contents 1 Table of Contents

IDX-OM-W016

. 3 2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Checks and Maintenance 4 1 Daily Check Points . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of Auto Drain Strainer . 4 1 Chapter 5 Troubleshooting . 5 1 IDFA Series Table of Contents 1 IDX-OM-W016 Air dryer Table of Contents Chapter

IDX-OM-W014

. 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1 . 10-1 10

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

1 4 11 13 3 8 " " 1 2 Principal Parts Material Element Part No.

Slider Type Ball Screw Drive/11-LEFS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

Digital Flow Switch ( compatible)

#-E#-### PNP (1 output) + Analogue (1 to 5 V) output type PF2MC7###-##-F#-### PNP (1 output) + Analogue (4 to 20 mA) output type Maximum load current: 80 mA Internal voltage drop: 1.5 V or less E: Analogue output: 1 to 5 V Output impedance: 1 k F: Analogue output: 4 to 20 mA Maximum load impedance: 600 Minimum load impedance: 50 PF2MC7###-##-A/B#-### PNP (1 output) + External input type

MHF2

1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Parts list Parts list Note No. Description No.

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.