Stations: 10 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female Thread Specification (M3)], 1st

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

IO-Link/ELECTRO-PNEUMATIC REGULATOR

End of report 7 Doc.No.DIT-69900-OM005-E Revision E: Correction concerning communication data, Product ID addition and correction by software modification. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

Multistage Ejector

When removing the product from the application, be sure to confirm that the safety measures are taken, and shut off the compressed air supply and the power supply before removing the product. 30 - Document No.ZL-OM01001-A Revision history Edition AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

HRX-OM-W004

(Initial value: 30sec.) 4.3 Setting and checking HRR Series 4-4 Revision Rev H [Jun 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-Q033

Sets monitoring time of communication error Setting range is 30 to 600 sec. to 6.3 Setting and checking HRSH Series 6-4 Revision Rev.EJul.2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC

High-precision Digital Pressure Switch

[April 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2021 SMC Corporation All Rights Reserved No.PS-OMV0009-E

IZx-OMV0005

No power ("PWR" LED is Two or more ionizers are 10 Green "NDL" LED is ON. 11 "ION / HV" LED is OFF obstacles/obstructions LED of PWR(green), An emitter surface is contaminated There are worn out. green flash. 12 13 14 4 6 8 9 failure No/poor neutralizing performance input Product does not operate Output Abnormal 34 Doc. no.IZ-OMV0005 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Remodeled

Part number of auto switch mounting bracket 28 Revision history Initial release : 2012/5/21 Revision 1 : 2014/1/30 Add the air cushion. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

Parallel Seal Type Slit Valve

Loosening of connection Replace Bonnet ASSY Air Leakage of Bonnet ASSY Wear of piston sea Replace Bonnet ASSY 11 - 12 - 13 - 14 - 15 - 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Air Suction Filter

Procedure 3 Element Cover Procedure 2 Procedure 6 Gasket Stop pin Procedure 5 Procedure 2 -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

ZH-OM00401 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 20 -

Vacuum Pad with Ejector

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

HRX-OM-T002

Product Warranty HRS090 Series 10-2 Revision Rev.PJan.2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

KFx-OMV0011

. : No data is available. 13 - Revision history A : Fluid N2 Turbine oil class1 (ISO VG32) add Applicable Tubing : TUZ add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights

ITV2-OM00112_E

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

High-precision Digital Pressure Switch

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2022 SMC Corporation All Rights Reserved No.PS-OMW0002-C

AIR FILTER

DIMENSIONS option addition, Shape changing of bracket. 2018.1 C P4 Correction:Maintenance CAUTION P23 Change:bowl tightening torque(AF20-A) P30 Correction: E dimensions(AF50~60-A) N, S dimensions(AF30~40-A) 2021.12 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior

 MICRO MIST SEPARATOR REGULATOR 

S Revision history A The tightening torque value of the element assy is changed. 2017.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 48 Series LECP2 Dimensions Screw mounting (LEC2-) 38 36.2 85 4.5 For body mounting 18.1 1.2 4.5 110 101 86 4.5 For body mounting CN4 I/O connector CN3 Encoder connector CN2 Motor connector CN1 Power supply connector DIN rail mounting (LEC2D-) 38 36.2 85 (11.5) SL 24.2 35 127.3