Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

CNA

C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

CNA

C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

CNA

12 15 11 M10 X 1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 X 1.75 11 26 to 750 With rod boot (mm) (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h ZZ 11 M14 X 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 215 20 to

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

HEC_001W-E

When the temp. set in this item is reached, the alarm [ERR12] arises. 7-8 Operation L o w T e m p . C u t o f f M O D E < 0 . 0 C 9. Low Temp.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

: A29 DA 30 MM DA 30 30 MM DA 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 149 CP96 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

Title not found

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol With Subplate CvO.7 w Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

e

M W Remote control type Nominal size Speed specifications [mm/s] 16 25 Stroke Made to Order (Refer to page 1099.)

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol CvO.7 w With Subplate Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

CY1

4 @9 @5 u y t r w @6 #0 !2 o e i !0 q !8 !5 @0 !9 @1 @2 @3 Port Parts list Parts list No. Description Cylinder tube No.

MB

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

Step Motor Controller

-m LECSS2-m L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N() W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

Electric Slide Tables

7 w t !2 !4 !3 @9 @5 @6 Shipped together #0 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.