25

Rc, NPT, G 1/8 PB PB With LQ3 fitting With LQ1 fitting (6.35) PAF (1.2) PA PB 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 79 87 77 2 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Speed Controller with Uni One-touch Fitting AS Series

Metric size Inch size Elbow type Universal type 1 8 3.2 4 6 8 10 12 " 5 32" 3 16" 1 4" 5 16" 3 8" 1 2" 1 8 AS221F-U01 AS231F-U01 Gasket 1 4 AS221F-U02 AS231F-U02 1 4 AS321F-U02 AS331F-U02 Female thread 3 8 AS321F-U03 AS331F-U03 Uni thread 1 2 AS421F-U04 AS431F-U04 Note 1) Elbow type only Note 2) indicates the control type (0 for meter-out and 1 for meter-in).

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

Ionizer Nozzle type IZN10 Series IZS

MPa 1 1 0.7 MPa 0 0 200 300 100 400 500 0 500 0 400 200 100 300 Installation distance [mm] Installation distance [mm] Flow Rate Characteristics Fig. 1: Flow rate characteristics measuring circuit q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 Pressure gauge 0.7 Flow meter Energy saving static neutralization

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY1 4, SY1 4A only 1 2 1 2 4-3-6 7 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

Round Type Hydraulic Cylinder

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

MXF

. (3) Allowable load weight coefficient : Graph (1) Wa = 1 x 1 x 4 = 4 K = 1 = 1 Wmax = 4 1 = 0.5/4 = 0.125 Find the allowable load weight Wa (kg).

76

F (C) Correction factor 58.0 (0.4) 0.9 1.06 72.5 (0.5) 36 to 77 (2 to 25) 0.93 1.02 87.0 (0.6) 86 (30) 0.96 1 101.5 (0.7) 90 (32) 1 116 (0.8) 0.99 95 (35) 1.03 130.5 (0.9) 0.98 104 (40) 1.06 145 to 232 (1 to 1.6) 0.92 113 (45) 1.09 1 Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140F (60C) (Max. ambient

PROFINET Compatible Fieldbus System

Description Even number 0 to 14 Odd number 1 to 15 1 Power supply (24 VDC) 2 (Input) 3 Power supply (0 V) 4.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Moisture Control Tube

Back page 1 Series IDK Specific Product Precautions 1 Be sure to read this before handling. Refer to back page 1 for Safety Instructions. Design Mounting Caution Caution 1. Do not use the moisture control tubes bundled together. Otherwise, the performance may be decreased. 1. Use the moisture control tube without lubrication. 2.

ARJ310

1 !5 q u o Material Note Parts list !

VVXA21/22

# " $ < " $ /3 1 !" Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"