SMC Corporation of America
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CKQPUA50 The below figures indicate the CKQPUA50-RAL. w e w e r r !4 !4 !5 !5 @8 @9 @9 #0 @8 @7 Theres no seal kit for CLKQPUA50. Theres no seal kit for CLKQGUA50. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQU/CLKQU. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQU/CLKQU.

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

Construction e q r q q Principal Parts Material No.

View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 523 FH150 Series Dimensions Differential pressure indication switch 62 Differential pressure indicator 16 (65) 29 A E F (34) 29 2 x Rc (d) J H 29 G OUT IN IN OUT Differential pressure indicator Differential pressure indication switch D (Element removal dimension) B C (mm) d A B C D E F G H J Weight

Contaminant density of 200 ppm Separator after contaminant adsorption FH FH HOW Fluid after cleaning with magnetic separator (5 ppm) Magnetic Separator Installation Examples q U-turn flow type w Underflow type e Overflow type Magnetic separator Magnetic separator Magnetic separator 525 A FHM Series How to Order FHM 100 FHMN 055 Main unit representative dimensions Main unit representative

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.

ALD600 ALD900 12612AP Check valve assembly Pilot body assembly e r Maintenance 12609AP Warning Glass fiber-inserted epoxy resin t Bowl assembly 126139-1A 126059-1A 1. Before removing the oil filler plug, loosen it two and a half turns to completely release the pressure inside the case.

Description AMR3000 1349161A 13579 135711A 135011 G75 135714 AMR4000 131515A 135511 13154A 131514 G90 635327 AMR5000 131515A 13589 135811A 131613 G100 635327 AMR6000 131614A 13569 135614-1A 135413 G115 63555 Diaphragm ass'y Element (1) Body Housing Bowl Bonnet Aluminum alloy Aluminum alloy Aluminum alloy Brass Stainless steel NBR Fiber q w e r t y u i o !

Dimension AVL2000 to AVL5000 Soft start up valve with lock out AVL2000/3000/4000/5000 (mm) Port size A B Model C D E F G H Lockable soft start valve. Gradual increase of supply pressure and rapid exhaust of system air when the supply is shut off.

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Note 1) Note 2) Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 07 10 0.7 mm 1.0 mm 1082 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 ZA Lead wire/ Voltage suppressor specifications ZX Plug-in type Serial transmission type LOZ ZR LOZ 10 X3 ZY 5 M Z

Description Body Note Baking finish Material q Aluminum alloy w w Aluminum alloy Baking finish Housing e Aluminum alloy Baking finish Drain guard y r Foam rubber Float IN t Stainless steel + Rubber Pilot valve y Resin Lever u Brass Flushing button t i Orifice r o Rubber Diaphragm Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35