)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%
0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%
0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%
Vacuum Manifold for fieldbus system N.C. 5 24 VDC E N.O. N.C. (7) Light/surge voltage suppressor and common specification Symbol Light Surge voltage suppressor Polarity U Non-polar (8) Pressure sensor Note 7) Symbol Specification T1 -100 to 100 [kPa] T2 -100 to 200 [kPa] Note 7) When Nil for (4) exhaust sealing valve is selected, T1 is available, when V is selected, T2 is available.
. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output DeviceNetTM status SI unit common status Green MS LED is On and green NS LED is flashing Commissioning Specification LED Display Outline with Dimensions Troubleshooting Vibration resistance Green MS LED is On and red NS LED is flashing 147 m/s2 3 times each in directions of X, Y and Z respectively
Red ST(M) LED is flashing Red PWR(V) LED is On Red BF LED is flashing Red ST(M) LED is On Red PWR LED is On Green LEDs are On 24 VDC Class2, 2 A Output Either of the following conditions: The cable between the master and SI unit is not connected. The SI unit cannot recognize the communication speed. The maser or the SI unit has broken.
. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output CC-Link status SI unit common status HOLD/CLEAR switch: Sets the output status when the fieldbus has a communication error.
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
(with no condensation)1000 VAC for 1 minute between terminals and housing50 M7 or more (500 VDC measured via megohmmeter) between terminals and housingCE marking, UL (CSA), RoHSPPS, FKM, CPVCNon-grease25A285 g370 g