PF3A7xxH.eng

[P] Set value of OUT 1500 L/min 3000 L/min 6000 L/min S button (SET) Press this button to change the mode and to set a value. [H] Hysteresis of OUT 150 L/min 300 L/min 600 L/min Connector pin numbers (lead wire) Specifications / Dimensions button (DOWN) Selects the mode and the display shown on the Sub display, or decreases the switch point.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

IDX-OM-W017

EVD PTC OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1 N L C R GFCI For Option R CM FM1 FM2 N L PE OLR TB PTC PTC ILS ILS PRS TB PE EDV C02 For Option V C11 OLR PTC GFCI EDV PE CM C01 C11 PE FM PRS P 6-4 IDFA Series 6 4 IDX-OM-W017 6 6-5 IDFA3E IDFA4E15E1 2 6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4 IDFA3E

Rotary Actuator NCRA1 Series Single Rack and Pinion

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

Compact Cylinder with Air Cushion

P-80 (YG) 2nd printing June, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

IDX-OM-W037

Generally, control becomes unstable if P is too small. Response becomes slow if P is too large. [Example] For setting P=10.0%, I=100sec., D=20sec. Display Operation procedure . 1. Make sure that the screen shows PV/SV display. PV SV 2. Press and hold the SEL key to switch to CH1 (PID control parameters). PV 3. Press and hold the SEL key. SV P (Proportion band) is displayed. 4.

Regulator with Integral Pressure Gauge

Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx

Heavy Duty Stopper Cylinder Series RSH/RS1H

Caution Operation instructions Consult P/A when using solvents other than water.

NCRAI seies

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

PF3A7xxH_eng

[P] Set value of OUT 500 L/min 1000 L/min The operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

CE

P-67.5 (YG)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Note) If there are more than 4 stations, supply air from both P ports and exhaust from both R ports.

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

240

(mm) Overhang L (mm) Overhang L (mm) Graph 2 Load Eccentricity 200 mm Graph .

AC Servo Motor Driver (Pulse input type)

[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)

Membrane Air Dryer

: P IDG-EL75LA IDG100LA,100SA Option : P IDG-EL100LA -5- 4.