LECA6_C

1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6

Power Valve: Economy Valve Series VEX5

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX592444 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None B Nil Bracket G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

Steam Valve

121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5

HRX-OM-W069

output signal 3 B contact (normally closed) By default 2.4.2 Contact output signal 4 to 6 Contact output signal 4 to 6 can be set to "signal type", "contact form".

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

LECP6_C

1 2 L A A-1 1 B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 14.2 2 1 (8) 14 18 B1 A1 17.7 5 6 2 1 A6 B6 15 16 11 30.7 112 [820m] A B-1 2 A A-1 1 L B B-2 6 8 8m B A-2 5 COM-A/COM B-3 3 A 10m COM-B/ A-3 4 B 15m Shield C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

VK3000

Plug that A port to avoid mistaking B port for the A port.

MRQ

Size/Standard stroke (mm) Angle of rotation 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to p.1.5-18 and 1.5-19 for middle and long strokes other than standard stroke.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Holder mounting Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002FS TMH-23J TMH-04J TMH-06J AS2002FS AS2052FS TMH-06 TMH-08 AS3002FS TMH-07 TMH-10 TMH-12 AS4002FS TMH-13 Tubing size Applicable model The applicable TMH for the AS1002FS-02 is not available.