Modular Pressure Control Equipment F.R.L. Replacement Procedure

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

RSH

20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-

VCA

y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Smooth Vent Valve

Service life cycles (10 thousand) Operating pressure (Pa) Leakage (Pam3/s) Effective area (mm2) Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Refer to the figure below.) 4) Remove the cable gland t and plain washer y and rubber seal u . 2. Wiring 1) Pass them through the cable i in the order of cable ground t, washer y, rubber seal u, and then insert into the housing r. 2) Dimensions of the cable i are the figure as below.

AR Series Modular Type Regulator

AW-A Optional specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Bracket assembly Note 1) AR12P-270AS AR22P-270AS AR27P-270AS AR32P-270AS AR42P-270AS AR42P-270AS Set nut AR12P-260S AR22P-260S AR22P-260S AR32P-260S AR42P-260S AR42P-260S AC-B AF-A Note 2) Round type Standard G27-10-R1 G36-10-l01 G46-10-l01 0.02 to 0.2 MPa setting G27-10-R1 Note 3) G36-4-l01 G46-4-l01 Pressure

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Precision Regulator, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Precision Regulator, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Precision Regulator, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Precision Regulator, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Precision Regulator, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Precision Regulator, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, PRECISION REGULATOR, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, PRECISION REGULATOR, REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

ITV_D-E

U se D C pow er suppl y w i t h suf f i ci ent capaci t y and a l ow ri ppl e. Turn of f t he pow er suppl y t o rem ove and i nsert t he connect or.