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MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

D20Y= L4= L2= W2= (mm) Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y W2 8.5 to 25 10 to 36 11 to 41 13.5 to 50 17 to 60 L4 max 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L2 2 L2 2 L2 2 L2 3 L2 4 11-7-39 40 Series CRA1 Made to Order Specifications: -XC7 to -XC64 How to Order B P D C S 50 RA1 F59 C 90 X C59 C62 -X10 -X16 Built in magnet Nil D None Built-in magnet Simple specials, Made-to-order

SFOD-OMT0009CN

51 No.SFOD-OMT0009CN-B 7.4 9 512 20482048 ()() Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 1 INC 500 800.00 1000 1000 1 0 0 10 2 INC 500 900.00 1000 1000 1 0 0 10 1 3 INC 500 900.00 1000 1000 1 0 0 10 4 INC 500

3

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200

Vacuum Unit

ZK2 (Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Load Weight Allowable Moment MY3A, MY3B/M1 MY3A, MY3B/m1 MY3A, MY3B/M2 MY3A, MY3B/M3 30 20 50 40 30 200 100 50 100 20 40 30 10 MY3A 3B63 MY3A 3B63 50 40 30 10 20 5 4 3 2 MY3A 3B63 10 5 4 3 MY3A 3B63 20 MY3A 3B40 MY3A 3B40 MY3A 3B40 Load weight kg 5 4 3 Moment Nm Moment Nm Moment Nm 1 2 10 MY3A 3B40 0.5 0.4 0.3 0.2 1 2 MY3A 3B25 MY3A 3B25 5 4 3 MY3A 3B25 MY3A 3B25 0.5 0.4 0.3 1

MHY2/MHW2

2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X

Tamper Proof and Flat Head Screw

/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

air-filter-e

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

Air Preparation Equipment

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Orifice size Voltage Orifice size mm 1 2 3 4 5 6 9 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other Symbol Series 1 2 1 2 3 2 3 4 1 1.6 1.6 2.3 3.2 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Options Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series Materials Materials 1 2 10 20 Symbol Nil A G H Plate material Seal material

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

Guide Cylinder Series MGG

, 50, 63, 80 and 100.) 13 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to