Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

17 140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D-M9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size Operating angle m Hysteresis angle Operating angle m Hysteresis angle A Operating angle m Hysteresis angle B A 20 20 15 15 10 10 10 10 190 190 190 190 40 35 30 25 10 10 10 10 55 45 40 40 10 10 10 10 16.9

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/32 Bulkhead Fittings 25/32 10-32 10-32 5/16 1/4 1/4 1/4 1/4 57/64 10-32 1/4 Hex Typ. 57/64 10-32 5/16 Hex 1/4-28 68 10 BK-1 or 10BK-2 10 BK-2 1/2 10 RBK4-2 1/4 BK-3 10 RBK4-2 1/2 Page 17 Distributed by Power Aire, Inc.

Vacuum gripper

9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B

Tamper Proof and Flat Head Screw

/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

High Power Cylinder:

Composed effective area So (mm2) 6 2000 h=0.7 10 1/4, 3/8 7.5 2500 REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500

Cylinder with Lock Series MNB

38 245 10.5 11.5 M22 x 1.5 3/8 61 72 33 14 69.5 341 100 177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600

Silencer Series AN

Series 25 19 dB (A) Page 5-10-4 VEX AN101-01 AN110-01 AN120-M5 AN120-M3 BC sintered body type Ideal for the exhaust of a compact valve or pilot air. 16 dB (A) 21 dB (A) 18 dB (A) 13 dB (A) 100 m AN Page 5-10-5 Silencers Exhaust Cleaner 70 m AMC One-touch fitting connection type Can connect with One-touch fitting directly. 25 dB (A) 30 dB (A) It differs depending upon the model.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5

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(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.27 mm 2.35 mm Connection type Screw tightening Rated current 4 A 8 A 9 A Rated voltage 60 V 600 V 250 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.0 kV 1.4 kV 4 kV Rating/Performance temperature Connector 25 to +90C 25 to +80C 25 to +85C Cable 25 to +80C 10 to +105C Ambient Min. bending radius (Fixed) 59 mm

Compact Rotary Actuator Series CRQ2

Applicable shaft types: S, W E3 = LL LL E1 = DKey L1 = X = L3 = (mm) (mm) LL 3 4 5 Key dimensions 4 x 4 x 20 4 x 4 x 20 5 x 5 x 25 Size 20 30 40 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X-2 X-2 Size 10 15 259 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA59: Shaft Pattern Sequencing Shaft pattern sequencing is dealt with a simple