4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

ACB ACB SYJ 2-4.5 (Mounting hole) SX 57.5 VK 52.5 51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station

3 Port Air Operated Valve

812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

Vacuum Module Series ZX

Filter JIS Symbol 32 41 51 2 x R1.8 1 10 8.8 (Mounting hole) 3.6 19 4.8 (Mounting hole) Filter M5 (or M6) IN port M5 (or M6) OUT port 2 x 3.5 (Mounting hole) (62) 58 50 8 OUT IN 18 15.5 4 11 20 4.2 6.8 11 8.8 Bracket A (Standard accessory) Note) Dimensions : For A mounting bracket. Filter case About this product Caution The filter mounted on the product is a simplified one.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(PT) 1/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65

Integrated Controller

0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s] 10 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS25HH/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 2.5 16 14 12 10 8 6 4 2 00 200 400 600 800

Compact Cylinder

100 426 446 467 488 509 530 551 572 592 100.0 Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75

Rotary Gripper Series MRHQ

22.5 M5 x 0.8 Finger opening port 3 MHZ 29 15 16 10 22 8 31 MHF 18 51.5 MHL 6 40 78 Angle adjustment bolt MHR 2 x 5.5 through MHK 2 x 9.5 depth of counter bore 3 11 MHS 2 MHC 10 0 -0.062 47h9 long groove depth 4 +0.03 0 3 x 4H9 M5 x 0.8 M5 x 0.8 Port A Port B MHT (one each on three sides) MHY 4 x M5 x 0.8 depth 8 MHW -X MRHQ N J I E A D P A A M N MA 8 C M S R R E O P T 22 8 P A R I R Y 12

CJP

Round type Flat type 5.5 NTP-006 CJ-CR006 CJ-CF006 6.4 1.8 M3 x 0.5 6 6 8 11 6 M3 x 0.5 5 6 8 7 NTP-010 CJ-CR010 CJ-CF010 8.1 2.4 M4 x 0.7 10 8 10 13 10 M4 x 0.7 6 8 10 8 NTP-015 CJ-CR016 CJ-CF016 9.2 3.2 M5 x 0.8 15 10 12 15 15 M5 x 0.8 7 10 12 6-2-13 8 Pin Cylinder Single Acting, Single Rod, Single Return Series CJP 6, 10, 15 How to Order A short stroke miniature cylinder with a shorter

CJP

Round type Flat type 5.5 NTP-006 CJ-CR006 CJ-CF006 6.4 1.8 M3 x 0.5 6 6 8 11 6 M3 x 0.5 5 6 8 7 NTP-010 CJ-CR010 CJ-CF010 8.1 2.4 M4 x 0.7 10 8 10 13 10 M4 x 0.7 6 8 10 8 NTP-015 CJ-CR016 CJ-CF016 9.2 3.2 M5 x 0.8 15 10 12 15 15 M5 x 0.8 7 10 12 6-2-13 8 Pin Cylinder Single Acting, Single Rod, Single Return Series CJP 6, 10, 15 How to Order A short stroke miniature cylinder with a shorter

Membrane Air Dryer

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.

Support Guide/11-LEFG Series

11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10

3

Through-hole/Both ends tapped common (Basic) 10 0.1 0.2 Q 12 (Rod size) G M5 x 0.8 (2 locations) (Port size) Auto switch Minimum bending radius of lead wire 10 R 4 3 E Yh9 S T 3 F M8 x 1.25 Effective thread depth 11 6.8 (The dimension on the opposite side is the same.) 5.5 (2 locations) 13.6 7 10 7 10 M6 x 1 (2 locations) Flat washer With 2 pcs. 9 (2 locations) (The dimension on the opposite

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

VP300/500/700

Wiring 1) Pass them through the cable (7) in the order of cable ground (4), washer (5), rubber seal (6), and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11). Note) Tighten within the tightening torque of 0.5 Nm 15%.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

PFA PPS PTFE N Pilot port thread type Symbol Nil 2 Body class 6 One-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Symbol Tubing O.D. Metric sizes 06 10 12 19 6 10 12 19 1/4 3/8 1/2 3/4 Inch sizes 07 11 13 19 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

CE

CC RB J D-X 20Data 10-12-11 11 Series CEP1 Dimensions: 12 Direct mounting, rod side tapped style: CEP1B12 Stroke 4 depth 4 (Positioning pin hole) Cable end + 0.05 + 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5

CE

x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04 40.7 42.3 46.7 43.9 45.5 49.9 53.6 59.1 62.3 59.2 64.9 69.5 10 11 20 12 11 21 15 23 30 40 40 65 11 37 4 17 4 4 10.4 10.4 KDM 14 41 M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18