For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Without connector) Note 1) Consult SMC for other voltages. 4.3-11 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Equation L1= (n1) X 29+49 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max.20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49

LFE-OMY0008

0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE

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[ Kit Requires for S kit SOO'.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Stainless Steel Cylinder Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 For use in environments with water spray such as food processing machines Stainless Steel Cylinder Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 Uses grease for food processing machines that meets FDA (U.S.

VXR21/22/23

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

IBV-OMY0015

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.

3 Port Air Operated Valve Series SYJA300 1

-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

3-Position Rotary Table

150 130 120 50 50 MSZA30A (High precision type) MSZA50A(High precision type) D70 60 50 40 30 20 10 0 120 100 80 60 40 20 0 Load N Load N 291 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Bag Filter

F-91S F-87S FGFC5-60 FGFL3-40 Carbon steel F-88S FGFR5-60 FGFC5-60 150(6B) F-92S F-88S 280 240 166.6 23 22 FGFS5-60 FGFR5-60 Stainless steel F-89S AL-80S AI-18S FGFL5-60 FGFS5-60 F-93S F-89S FGFL5-60 Note) 2 pieces are required per filter unit. JIS10KFF is used for this flange. Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.)

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

ZL3-OM00801

135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10

Power Valve: Economy Valve Series VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Thread type Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

180

20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703 180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)