C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5

CJ2X/CUX/CQSX/CQ2X/CM2X

10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11-CQSX Air Cylinder Series 10-/11-CM2X Air Cylinder Series 10-/11-CQ2X -X 20Data 10-3-1 2 Low Speed Cylinder Low Speed Cylinder Improved low friction characteristics (CM2X, CQSX

51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-13 (S) 1/2" 19.3 30.9

Magnetically Coupled Rodless Cylinder

+ Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x

MXS Series Air Slide Table

The absorbing stroke for both of these models is reduced to 10mm from 11 or 12, respectively. End Lock Specifications Model MXS8 MXS12 MXS16 MXS20 MXS25 8 12 16 20 25 Bore size (mm) 2-20 in/s (50~500m/s) Operating speed range 5.62 13.5 24.7 36.0 56.2 Holding force (lbf) 1 lbf = 4.4482 N Note) Refer to P. 14 for cautions on end lock.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Compact and Lightweight

ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Microspeed Cylinder

11-CQ2X 20, 25, 32 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore size (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min. operating pressure (MPa) Bore size (mm) Min. piston speed (mm/s) Min. piston speed (mm/s) Min. piston speed (mm/s) Bore size (mm) Min. operating

2/3 Port Valve

(No need to add options "S" and "L".)

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

Rotary Actuator/Vane Type

E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

MXS

, 125, 150 S n Auto switch Without auto switch * Refer to below table for parts No. of auto switch.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

+ Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x