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Refer to Effective Gripping Force for the gripping force at each gripping position on pages 12-6-7 to 12-6-11. P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !

A filtration degree of 5 m or less should be selected.

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55 89 6 25 25 60 60 30 30

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

Minimum Strokes for Auto Switch Mounting 20 & 25 Auto switch type No. of auto switches D-A9, D-F9W D-A9V, D-F9WV D-F9 D-F9V D-F9BAL 1 pc. 5 5 20 2 pcs. 10 5 20 Auto switch type 32 to 100 D-Y5, D-Y6 D-Y7 D-Y7V D-Y7W D-Y7WV No. of auto switches D-Z7 D-Z8 D-Y7BAL 10 1 pc. 15 5 5 10 2 pcs. 15 5 10 2 Series CHKDB Theoretical Output Unit: N Operating pressure (MPa) Operating direction Bore size

It consists of a circuit equipped with a function to prevent lurching during release. 1 1 2 4 5' 3' 5 3 5 3 Conversion adapter plate VV72-V-1 This conversion adapter plate allows a VQ7-6 (size 1) valve to be mounted on a VQ7-8 manifold base.

. 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFC60/70/80/90 Series IDX-OM-W095 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 C . 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 .

J Connection thread Width across flats H N S U F GN GS B3 M3 x 0.5 3 11 6 02 04 06 08 6 10 15 25 J K ZP T U A8 G B5 M5 x 0.8 5 13 8 Dimensions Per Vacuum Inlet: One-touch Fitting Model Vacuum inlet: Barb fitting G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

A002 CKZ Arm 63 Arm code (Refer to page 3 and 8 through to 11.)

) AC200V () [30mA 10A] 1.25mm 2 (16AWG) 812mm3 () 0.1m 30m (11 ) M3 6.5mm 2 5 2

power supply (+) Lock release (+) [I/O cable] LEC CK4 Cable length (L) [m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Dot mark Insulation color Terminal no.

I.D. 3 x Applicable tubing 1/8" (3.18) 0.086" (2.18) KFG2T0122-00 11 1.1 7 8 13.3 5 1.5 d H2 H2 H2 H1 0.098" (2.5) 5/32" (4) KFG2T0325-00 11 1.6 7 8 13.3 5 1.8 M 1/4" (6.35) 5/32" (3.95) d KFG2T0704-00 26 6 10 12 16.5 6 3.3 L 5/16" (8) 0.236" (6) KFG2T0906-00 39 17 12 14 18.7 6.6 5.3 M L M L 3/8" (9.53) 1/4" (6.35) KFG2T1163-00 70 19 15 17 22.2 7.6 5.6 1/2" (12.7) 3/8" (9.53) KFG2T1395-00

* ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch fitting 8 (5/16") One-touch fitting Panel mount adapter B T Output specification B E 2 PNP outputs 1 PNP output + Analog (1 to 5 V) Panel Mounting bracket

12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 11 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)