Series MXP Precision Air Slide Table

Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-

DOC1020530

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

DOC1003626

+ Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig.2-2 Circuit diagram 2.2 Communication specification HRS400-A-46 2-4 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.3 Contact input

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Heavy Duty Stopper Cylinder Series RSH/RS1H

24.5 17 24.5 9.5 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Soft Start-up Valve AV2000/3000/4000/5000 1

29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5

PFxx-OMP0001CN

] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2] 36 [1000] 1000 L/min(PFMB7202) [ 25] 25 L/min(PFMB7501) 2 [H_2] OUT2 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [F 3][rES] [rES] [1.00] 1 41 [F10][FLo] [FLo] [inS] 42 [F13][rEv] [rEv] [oFF] 43 [F20][inP] [inP] 3 [rAC

Speed Controller with One-touch Fittings

21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 22.8 12 20.5 4.3 8 19.3 22 25 12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

Compressed Air Preparation Filter

. *5 If the compressor is small (0.75 kW, discharge flow is less than 100 L/min (ANR)), air leakage from the drain cock may occur during the start of operations.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10

Copper-free Actuators

Air Cylinder Bore size (mm) Name of CAD file Series Application Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Compact cylinder Series CQ2 2.3-2 20-CQ2 Standard 2.3-108 20-CQ2 Standard long stroke (Note 1, 3) SCQ2l 2.3-22 20-CQ2W Double rod 2.3-56 20-CQ2K Non-rotating rod 2.3-118 20-CQ2lS Anti-lateral load Compact cylinder with

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10 20 D0 20 40 60 Gripping point L (mm) 100 80 20 40 60 Gripping point L (mm) 80 100 120 140 160 0 20Confirmation of Gripping Point MHY Step 2 MHW 200 60 H H 50 Overhang H (mm) Overhang H (mm) MHW2-20D 150 MHW2-25D MHW2

α PneuAlpha HARDWARE MANUAL

Hardware Specication 2.1 Available Models PneuAlpha Hardware Specification 2 ECC-PNAL-20MT-D 12 TRANSISTOR 8 ECC-PNAL-10MT-D 6 TRANSISTOR 4 (0.70)* ECC-PNAL-20MR-D ECC-PNAL-20MR-A 100 240V AC~ 100 240V AC~ 12 RELAY 8 124.6 x 90 x 55 ECC-PNAL-10MR-D ECC-PNAL-10MR-A 6 RELAY 4 ECC-PNAL-6MR-A 100 240V AC~ 100 240V AC~ 4 RELAY 2 71.2 x 90 x 55 Model Power Supply * Without Special Connection Modules

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

CEx-OMQ0013

85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm 2D FG0.75mm 100 FG FG 7-2-2 5m 20m5m20m CE1-H0374 22 CE1-R 20m 200m 5m 20m * A DC12V 0.3A B AWG24 DC12V 0.3A CEU2 CE2 U 25mm 400 200mm 1 R25 100 / 23 7-3 7-3-1 2 (AC100V,15%) 1 24V10%,0.4A) 4 CEU2 3 2 1 END / 1. 2.

80

Compact Direct Operated 2 Port Solenoid Valve VDW Series RoHS Air Air Medium vacuum Medium vacuum Water Body material Aluminum Resin(PPS) Lightweight Lightweight 80g Current Brass body (VDW2) 100 g Air Air Water Aluminum/Resin(PPS) body (VDW2) Compact Compact Current model 15 mm 15 mm 17 mm Aluminum body Only for air.

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

VVXA21/22

C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108