D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

AFF

6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

22 Mechanically Jointed Rodless Cylinder Series MY3A/3B Note) The operating ranges are provided as guidelines including the hysteresis and are not guaranteed values (with approx. 30% variations).

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

Nozzle Type Ionizer

signal Effective static neutralization range 20 to 500 mm Ambient temperature (Operating/Stored) 0 to 55C Ambient humidity (Operating/Stored) 35 to 65% RH (No condensation) Housing ABS, Stainless steel Material Nozzle Stainless steel Emitter Tungsten Impact resistance 100 m/s2 Energy saving static neutralization nozzle 70 g Body weight High flow rate nozzle 70 g Female threads for piping 75

Heat Resistant 2-Color Indicator

Indicator light Operating Range [mm] Auto switch model Bore size 16 20 25 32 40 50 63 D-M9NJ D-M9PJ 4.5 4.5 4.5 5 4.5 5 5 22 64.5 4 Since the operating range is provided as a guideline at room temperature, it cannot be guaranteed. It may change substantially depending on the ambient environment.

Micro-Mist Separator with Prefilter Series AMH

10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110

240

MXH10 0 0.005 0.01 0.015 0.02 0.025 0.03 0.035 0.04 0.045 0.05 0 0.5 1 1.5 2 2.5 3 3.5 Roll moment Mr (Nm) MXH16 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0 1 2 3 4 5 6 7 Roll moment Mr (Nm) MXH20 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0 2 4 6 8 10 12 Roll moment Mr (Nm) 22 Compact Slide MXH Series Construction MXH MXH !2 !3 !1 t y u i !4 w q !

Dual Speed Controller with One-touch Fitting Series ASD 1

55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions of M5

ASD

20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S 18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101 34.4 55.9 20.9 10 21 177 ASD630F-04-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions

IR1000/2000/3000

83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43 Approx. 60 50 50 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port M6 x P0.5 15.5 9 82 60 IR3120-0 Mounting hole 48 2.3 76 Approx. 148 22 Bracket (optional) Bleed 43 Pressure gauge (optional) EXH(3) OUT SUP(1) OUT(2) Rc(PT) 1/2 Exhaust port 15.5 M5 depth 7 Approx. 68 66 9 66 22 76 Approx. 144 IN

VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5 36 4 40 180 Operating range of auto switch

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Recommended terminals NVFR 2000, 3000: 1.25-3, 1.25-35, '1.25Y-3N, 1.25Y-3S (1.25mm centers) (spade type, size 4, 22-16 AWG). . NVFR4000: 1.25-3.5M. 1.25Y-31. 1.25Y-3M. .

IDX-OM-V020

(Allowable inclination difference in the vertical direction is 5) 3) For IDFA60, mount male elbow (width across flats: 22) to the drain outlet port (width across flats: 27). For IDFA70, IDFA80 and IDFA90, mount male connector (width across flats: 22) to the drain outlet port (width across flats: 22) and mount the drain tube.

ZSE3/ISE3

(Crimping tool: DXT170-75-1) 3. Attaching and detaching lead wires with sockets Attaching Push the socket into the square holes of the connector (with +, 1, 2, indication), and continue to push the sockets all the way in until they lock by hooking into the seats in the connector. (When they are pushed in their hooks open and they are locked automatically.)

ZFC Series

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Modular Type Lubricator Series AL

Refer to pages 75 through 78 for safety instructions and F.R.L. unit precautions. P1 = 0.1MPa 0.04 0.04 0.02 0.02 Selection 0 0 15000 10 5000 Warning 1. Do not introduce air from the outlet side as this can damage the damper. Caution 1.