Table of Contents

46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Slider Type Ball Screw Drive/11-LEFS Series

with lock [kg] S4: 0.7/S8: 0.7 523 523 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS25 +0.025 0 3H9 ( ) depth 3 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (6) Body mounting reference plane Note 1) 45 38 50 3.5 +0.025 0 3H9 ( ) depth 3 Motor option: With lock Encoder cable (7) Lock cable (4.5) (2.2) L Motor cable (6) (52

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

2–4

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without auto switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

Modular F.R.L. Unit

Port size Standard specifications Accessory specifications With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5 38.5 42.5 42.5 V 30 31 35.5 37 U 2.3 2.3 2.3 2.3 T 55 53 70 70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 70 76 76 E 40 57 73 73 D 52

ITV

L-bracket Description ITV20ll ITV30ll Flat bracket 100 P3020114 25 15 L-bracket INI-398-0-6 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 36 7 m36 84 4-5.5 4-7 36 7 70 60 20 12 4-5.5 1.6 1.12-2 Electro-Pneumatic Regulator Series ITV2000/3000 Working Principles When the input signal rises, the air supply solenoid valve (1) turns ON, and the exhaust solenoid valve (2) turns OFF.

Modular F.R.L. Unit

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H J

MLGP

5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100 120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52

MLGP

5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100 120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52

MXW

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-7-6 7 Long Stroke Slide Table Series MXW Specifications MXW8 MXW16 MXW20 MXW12 MXW25 Model 8 x 2 (11 or its equivalent) 12 x 2 (17 or its equivalent) 16 x 2 (23 or its equivalent) 20 x 2 (28 or its equivalent) 25 x 2 (35 or its equivalent) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Air Fluid Double acting

SYJ300/500/700

.: 4, 5/32" A A 5 5 (Pitch) P=10.5 15.5 M5 x 0.8 (A port) (Pitch) P=10.5 15.5 Station n L1 L2 3 52 44 Station 20 230.5 222.5 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 Station 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 4-4-15 16 Series SYJ300 Type 20R Manifold: Top Ported

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

480 500 520 540 560 580 600 620 640 660 760 860 52 860 890 920 950 980 1010 1040 1070 1100 1250 1400 100 1250 1290 1330 1370 1410 1450 1490 1530 1570 1770 1970 100 2380 2470 2560 2650 2740 2830 2920 3010 3100 3550 4000 172 3520 3630 3740 3850 3960 4070 4180 4290 4400 4950 5500 283 Specific Product Precautions Be sure to read before handling.

Compact Cylinder with Air Cushion Series RQ

Rod end nut L1 Front flange type Front flange type/RQF, RDQF mm Bore size (mm) Stroke range (mm) A L L1 15 to 50 20 46.5 14.5 28.5 15 to 50 25 51.5 15 32.5 FV mm FX 8 Bore size (mm) B FV FW FX FZ B + Stroke L FZ A + Stroke 2-6.6 20 39 48 32 40.5 60 25 42 52 36.5 44.5 64 Rod end male threads (Only dimensions A, L, and L1 are different and other dimensions are identical.)

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.