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This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

0.71 + 0.003 M22x1.5 0.89 '.22.5) 1 0 2 1.46 1 4 2 t 0 a 3 5 8 2 A O (91) (37) (36) (71) 126) ).79 0.0033 r . 1 0 .a 13 rV26,1 5 0 9 6 3 2 7 1 4 6 1 5 7 I t 0 (20 + 0 oB4) (30 ""J Millneters'n Parenlheses (83) (40) o05) \37) :24.51 128) DOUBLE CLEVIS BOFE dEt L1 6ND NX NZ 0.63 0.47+0.003 2.36 M r B x 1 . 5 0 5 9 1 0 6 1.06 1 1 0 ri6 ji) 1.50 50mm (12 + 0.070) (15) {38) (28) 160) 127') \27

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

Note 3) Combinations of H and M, R and S, S and T, A and H, L and M are not available.

C24V 10% CO N SU M PTI O N CU RREN T AT CO N STAN T O U YPU T 120M a O R LESS I N PU T SI G N AL D I G I TAL 10bi t ( PARALLEL I N PU T) I N PU T I M PED AN CE 4. 7k O R LESS LI N EARI TY 1% F.

CH1 r Circulating fluid flow rate It indicates the fluid flow rate. This value is not measured by a flow meter. It should be used as a reference value (rough indication).

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 2-2-36 Base Mounted Series VQC Plug-in Unit VV5QC41 S Kit (Serial transmission kit: EX240) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port VQC SQ 23 SMC SMC SMC SMC SMC SMC SMC 12 20.5 8 VQ0 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 75.5 61.5 77.5 72 43.5 42.7 VQ4 15.7 (1.5) 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ5 11.5 21.5

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

qe r q e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Seal Tube Can be used for a wide range of pressures from a low vacuum up to a pressure of 1.0 MPa The use of a special profile ensures sealing and reduces resistance when the tube is inserted.

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

AK VCHC ASR ASQ 589 AS-FS Series Construction: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread o !0 !1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018