3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Compact Cylinder

+ Stroke L W E M K J 2 x P (Rc, NPT, G) (Port size) 100 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N P Q W Z A B A B 50 10 to 50 37 29 42.5 34.5 15 18 57 9 M10 x 1.5 74 6.5 16 8 46

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

Air Cylinder CP Series Cylinder Positioner Assembly

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

Title not found

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) E H M-5H-4 M-5H-6 15.5 16.5 8.5 9.5 7 8 1.8 2.5 7 8 2.1 4.0 2.7 3.9 6.5 8.5 91 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M5 Hose elbow: M-5HL-4, -6 Part No. Effective orifice(mm2 Weight (g) ) F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.4 2.4 4.4 5.2 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 Hose elbow: M-5HLH-4, -6 Part No.

-fl Seies

007'e) 5 14.2) > lnigrtace rggulator/Egulatior to B I{ABBF4O50.NO.E.i lPlug.in typl NAnBF4O50.N0.B.2 (l{on plug.in typel ( > :B(H block disc IntErlace speed control wFs4ooo-2oA.l (Plug-in typ) wFs4ooo-2oA-2 (Non plug-in type) o 6 5 B 5 d bet 1.65 F/-.-r r r R < i 5 'gauge nipple siz may vary slightly Series NVFR400[:Base Mounted T]pe @ o Manifold block Parts List No.

MXF

2-M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224

ISA2

In case of series VC (B type coil) Conduit terminal, DIN type connector PSE Rectifying device ZNR DC circuit AC circuit ZNR 1 (+, -) 1 Z I SE3 SOL. SOL.

FSQ seies

h rifirqrlo& . Leak currcnt None ' Besponsenme 1.2ms .

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS-FG A (2) L2 (1) L3 T1 T2 H L1 D1 D2 Model Min.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 T D1 H D2 D3 L1 L2 Max. Min.

VQ

Latching Negative COM Large flow capacity H Y B Option Note) Latching style manual override: Looking-push slotted style only. (1) L Electrcal entry N L plug connector, With lead wire and light/surge voltage suppressor L U Option Note 1) Except for latching and large flow capacity style.

CYP

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E