C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

REA/REB

0 t !8 u Parts list Description Material Description Material Note Note No. No.

0.4

Positive COM spec. 576 VQC Series Plug-in Unit Base Mounted T IP67 compliant VQC1000/2000 Series Kit (Terminal block box) VV5QC11 (L4) (L3) (5.25) L2 L1 103 Manual override 7 1 1.5 P = 10.5 28 13 (12) SV (5.5) 1.5 Indicator light D side U side SYJ A B A B A B A B A B A B A SZ 2 93.5 126 80 75 66 (35) VF (59) 4 x M4 mounting hole (40) VP4 n 1 2 3 4 5 6 7 8 2 x M5 mounting hole Stations U

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i q Series w Type 10 Side ported e Wiring 1 JSY1000 3 JSY3000 5 JSY5000 TC Spring type terminal block box T Terminal block box r Valve stations t P, E port entry U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 24 stations) TC: Spring type terminal block box T: Terminal block box Symbol Stations

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375 43 108 Series CHAW Dimensions Foot type: CHAWL H + Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA

REA/REB

8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

IDX-OM-W095

1.01.3Nm M4.0 1.42.0Nm () TEST () [3.2.5 ] L N IDFC60/70/80/90 Series 10-2 IDX-OM-W095 T 11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23

0.4

L8 = 16n + 118.5 100 VQC 1/2 Dust-tight, Water-jet-proof (IP65) SI unit VQC 4/5 (EX124 Integrated-type (output) serial transmission system) (L4) VQZ (L3) (5.25) L2 L1 34.5 34.5 P = 16 SQ (n-1) x 16 6.5 1 73.5 0.9 1 VFS Indicator light (12) 13 Manual override VFR VQ7 (5.5) FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 4 46.2 1 ERR T/R RUN (35) 0 10.6 Drawing shows a SC case. 4 x M5

Stopper Cylinder

0 w q e r t u !

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 10.6 4 46.2 1 ERR T/R RUN MODEL SB RD SD 0 EX123: 2 x G1/2 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assy (AXT100-B04A) on the unused conduit port (G1/2). L8 = 16n + 118.5 100 Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 10.6 4 46.2 1 ERR T/R RUN MODEL SB RD SD 0 EX123: 2 x G1/2 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assy (AXT100-B04A) on the unused conduit port (G1/2). L8 = 16n + 118.5 100 Drawing shows a SC case.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

SYJ3000/5000/7000

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !