Clean Regulator

Open the sealed package inside a clean room. These products are packaged in sealed double packaging in a clean room. It is recommended that the inside packaging be opened in a clean room or other clean environment. 2. Flush out the piping. ITV IC ITVH ITVX Connect these products to piping only after it has been flushed and cleaned properly.

ZSE30A(F)/ISE30A

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min. B Released Work 1 Work 2 Work n D Peak/Bottom value indication Atmosphere This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Digital Pressure Sensor

GS 5 9 8 5 PS 36 3 22 22 ISA 3.2 ZSE1 ISE1 ZSE2 ISE2 1 M5 PT 40 ZSP ISl SET ALM. 20 kgf K P M b ZSM + _ PFl UNIT P.SET IFl 3.6-4

Dedicated Controller

performed from a PC.

PSxx-OMU0005CN

01 N01 C4L C6L M50.8 R1/8 NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Auto Switch Proper Mounting Position (Detection at Rotation End) 11-CDRA130 11-CDRA150 Auto switch Auto switch Connection port A A A A Note) For size 30, the auto switch cannot be mounted on the connection port side since there is a vacuum port.

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l/8 a a a a a 3/8 a a a 1/2 a 3t4 a a a a Note 2) For M5 and NPT thread lypes Accessories Wrlh o?

Support Guide/11-LEFG Series

Change the speed setting to a speed that does not cause vibration. Body fixed A Maintenance Warning L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEFl16 M3 0.6 3.5 20 LEFl25 M4 1.5 4.5 24 LEFl32 M5 3.0 5.5 30 LEFl40 M6 5.2 6.6 31 Maintenance frequency Perform maintenance according to the table below.

ZCUK

1 Free Mount Cylinder for Vacuum Series ZCUK A free mount cylinder with a vacuum passage in the rod to meet the requirements for Air cylinder + Vacuum pad .

2/3 Port Solenoid Valve for Chemicals

M5 thread OUT IN Symbol Plate PEEK PEEK PEEK Diaphragm EPDM FKM Kalrez A B C 11R 2 N.C. (Symbol 1) IN (Symbol 2) OUT Option Nil Nil Bracket Manual override Bracket, Manual override 1 2 3 12R N.O.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

M5 thread OUT IN Symbol Plate PEEK PEEK PEEK Diaphragm EPDM FKM Kalrez A B C 11R 2 N.C. (Symbol 1) IN (Symbol 2) OUT Option Nil Nil Bracket Manual override Bracket, Manual override 1 2 3 12R N.O.

Slider Type Ball Screw Drive/11-LEFS Series

0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

ML2B

[Horizontal and lateral mounting] A B SOL.3 W RE A B A magnetic field of 14.5 mT is equivalent to a position that has about 18 cm radius from a welded part using about 15,000 amperes of welding amperage. When using it in a stronger magnetic field, cover the sensor with magnetic and shield it.

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Safety Instructions

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

ZB-OM00301

M5 Q1 +COM N.C.

NARM Series

modular type that can easily be mounted in a manifold station.

IC

Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to a malfunction. 2. The tensile strength of the cord is 20 N. Applying a greater pulling force on it can cause a malfunction. When handling, hold the body of the sensor do not dangle it from the cord. 3. Do not exceed the screw-in torque of 3.5 Nm when installing piping.

Smooth Cylinder Series CQSY

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5