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Do not modify the internal electrical wiring of the product. 10.2 Earth leakage breaker specification Models Item IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R Rated current (A) 10 15 20 30 Sensitivity current (mA) 30 IDFC60/70/80/90 Series 10.1 Safety instructions for use 10-1 IDX-OM-U010 Chapter 10 Option R 10.3 Connection of power supply Connect the power cable according to the procedure

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 29 - Kinetic energy Table 10 shows the allowable kinetic energy of the rotary table. Here, the angular speed can be found from the formula below.

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut

) Delivery pressure (psig) Delivery pressure (psig) 0.14 20 40 0.28 0.10 30 0.21 15 20 0.14 0.07 10 0.03 10 0.07 5 0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Using a lubricator If mounting a lubricator, mount it on the inlet side (P port side), of this product. If mounted on the outlet side (A port side), back flow of oil will occur and may spurt out of the valves R port. 8.

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

,.);:-| I Driver unit lt lllnm --i -"r I ' I r_coo-r l]jj ,Tt-r f#posi,ioninsi I | *.!{l ). I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 6 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Mount a digital pressure switch into the connection port for pressure gauge, as it is not mounted at the time of shipment. Standard model no. 10 F.R.L. Note) Please contact SMC if a product with pressure gauge is desired. Specifications AV Clean Series Made to order part no.

AR20K-B to AR60K-B A-A w A 2 OUT 1 I N C SM A w w Pressure in diaphragm chamber Inlet pressure (IN) Pressure in diaphragm chamber Inlet pressure (IN) r r IN OUT IN (Inlet pressure) OUT (Outlet pressure) q q e e Figure 1 Normal Figure 2 Backflow When the inlet pressure is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

O.D.: 6, 8 K A Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port

B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Useable range 10 10 Load Work piece Useable range 5 5 Fn 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 7 8 9 1 01 11 21 31 41 5 Lo Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B40 CY3B20 Selection example 500 200 Given a load drive resisting force of Fn = 100 (N) and a distance from the cylinder shaft center to the load application point of Lo =

0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !

SS070M013A Replacement Parts Description No. e r Part no. Material Number Gasket 10 SS070M-80A-1 FKM Clip 10 SS070M-80A-2 Stainless steel 4-11-16 17 Series S070 Specific Product Precautions 1 Be sure to read before handling. Valve Mounting/Removal Screwing in M5/M3 Thread Caution Caution 1.

, IDFB Series 6-5 6-4 IDX-OM-W035 7 K 7 K 7-1 ( ) 7-2 240psi (1.6MPa) AD48N-8Z-A-X2112 (N) AD48-8-A-X2112 () KQ2H11-35AS (N) KQ2H10-02AS () 3/8 (N) 10 () IDFB22E/37E--K N.

Useable range 10 10 Load Work piece Useable range 5 5 Fn 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 7 8 9 1 01 11 21 31 41 5 Lo Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B40 CY3B20 Selection example 500 200 Given a load drive resisting force of Fn = 100 (N) and a distance from the cylinder shaft center to the load application point of Lo =