Check Valve Series AK 1

flow Female thread Male thread t r t r Free flow One-touch fitting Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

LG1H

4-M8 x 1.25 thread depth 10 20 8H10 depth 10 Encoder signal line Bending radius 80 Motor power line Bending radius 80 8H10 depth 8 35 85 210 78.5 78.5 Stroke + 229 (table movement range) 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 386 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 The body mounting reference plane and work piece

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Series KC Self-seal Fittings

Rc(PT) 1 4 KBZ1-04 KBZ1-06 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 Rc(PT) 3 8 16 Bulkhead female connector: KBE Female connector union: KBH T Connecting thread Applicable tube O.D. Part No. Part No.

Refrigerated Air Dryer

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

CNS

Graph (1) 30 20 10 2.

Magnetically Coupled Rodless Cylinder

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

XLAQ/XLDQ

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C None w, e, r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

KB

Rc(PT)1 4 KBZ1-04 KBZ1-06 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 Rc(PT)3 8 16 Bulkhead female connector: KBE Female connector union: KBH T Connecting thread Tube O.D. Part No. Part No.

Dedicated Controller

ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

Modular Type Regulator Series AR

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

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D-PH1Z, PH9Z 550 Additional weight .. 0. 10/ 25 stroke . Cylinder stroke 100 stroke 88-2 2S(Detectlng '00 asserrtly :t ~:/ l# 0123456 ~Soeed contrdler' Needle revolutions 7 8 Double knuckle joint .. . . 0.28 (V) . . . -0.4 (D-PHI L) WeiQ ht (Qt) Auto switch PIUQ No.

VP3145/3165/3185

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-10

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated