M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5
0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5
H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
1 3 Port Air Operated Valve Series VPA3145/3165/3185 How to Order SA 04 4 5 1 VPA3 VA Thread type SA VPA Air operated valve Nil Rc G NPT NPTF F N T VA 1 Number of pilot VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc
(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.
Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: GN (Conductive NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: F (Fluoro Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 15mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 15mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)