Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R 18 M10 x 1.5 80 22 M12 x 1.75 100 22 M12 x 1.75 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Rod end

Pin Clamp Cylinders

(Unclamping side) Bore size Nil Without lock L With lock 32 32 mm Auto switch type Nil Without auto switch (Built-in magnet) C D-P3DWASC E D-P3DWASE N D-P3DWA L D-P3DWAL Z D-P3DWAZ Guide pin diameter Mounting surface position (viewed from top) For guide pin diameter, refer to Table 1 below.

Pin Clamp Cylinder Series CKQ/CLKQ

F Pin hole a side a side Mounting tap: M12 x 1.75 Pin diameter: 10H7 Port Body (mounting side) C Port a side ( side) b side ( side) b side Clamp arm positioin (clockwise from top) Port a side : Mounting tap : Pin diameter : Mounting tap : Pin diameter D 180 from port Same direction as port b side Guide pin Port E 66 Port b side A C E Clamp arm Guide pin Clamp arm Port a side Mounting hole

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700

Air Cooled Aftercooler Series HAA 1

Fan motor Outlet thermometer Model Selection (Flow Capacity l/min (ANR)) HAA7 HAA15 HAA22 HAA37 Model Outlet side air (COOL AIR) 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000 Inlet air temperature 4300 Cooling side air Cooler Conditions: Outlet temperature 40C, Ambient temperature 32C, Air pressure 0.7 MPa Drain 14-15-1 2 Series HAA How to Order Precautions 15 10 D 1

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700

A span adjuster and zero adjuster are provided for the adjustment of the feed back spring.Provides accurate and stable positioning of air cylinders, Compact design, Zero adjusting screw and feedback spring material available in steel or stainless steel, Available in standard, low or high temp, POSITIONER, POSITIONER, 700 lb

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 700, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 700, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

5 Port Solenoid Valve/Body Ported Cassette Type Manifold Series SY3000/5000/7000 Introducing the new Series SY7000 5 Port Solenoid Valve/B Cassette Type M Series SY3000/5000/7 Compact and Light Weight SY3000 SY5000 SY7000 Series 22% reduction 24% reduction 18% reduction Height 15% reduction 20% reduction 10% reduction Weight (Compared to P/A's SY3000/5000/700 stacking manifold) Series SY7000

IDX-OM-M051

Note2:See specification table for refrigerant used in th e product. 6.2 Refrigerant with GWP reference 6 2 IDF100F~150F-W IDX-OM-M051 Air Dryer 6. Reference Heavy duty auto drain 6.3 Outer dimensions [IDF100F-30-W] Ball valve (O.D.10, Length approx. 2m) is also available.)

IDX-OM-W032

F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 6 2 IDX-OM-W032 6 6-4 IDFA22E, 37E GFCI R GFGI For Option R L N PE TB ILS V For Option V EVD EDV CM OLR PE C01 C11 PE FM PRS P IDFA55E, 75E GFCI R L N PE CM FM () MC C01 CM C11

VBA-OM-P019

1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/4 1/4 VBA2/VBA4 TSG R0003-2007 2 () IN :VBA2 8VBA4 8 10 (I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22~24Nm(R3/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E

A span adjuster and zero adjuster are provided for the adjustment of the feed back spring.Provides accurate and stable positioning of air cylinders, Compact design, Zero adjusting screw and feedback spring material available in steel or stainless steel, Available in standard, low or high temp, POSITIONER, POSITIONER, 805, 700 lb

BATTERYLESS ABSOLUTE E ACTUATOR, IP65. 4.10000 lb. A06.

BATTERYLESS ABSOLUTE E ACTUATOR, IP65. 2.80000 lb. A06.

Size: 25, Motor Mounting Position: Top Mounting, Stroke: 700, Motor Option: w/o Option, Stroke Adjustment Unit: E (End Side Only)

Size: 32, Motor Mounting Position: Top Mounting, Stroke: 700, Motor Option: w/o Option, Stroke Adjustment Unit: E (End Side Only)

Piping adapter assembly - old style see E*00 - New Style , Easy maintenance , Detach equipment without removing piping , Assembles to FRL's by simply tightening screws , Available with a "L" and "T" type bracket, VALVE, SOL, 4/5 PORT SOLENOID VALVE, J99, 700 lb