High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

PSxx-OMU0002CN

5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.

1

30 d (D) (C) (D) (C) H B H B Part no.

NCX2 seies

415-500 ltcx2Ors-700 Wi[| Auto switch, rhlsing mou type: NCDBX2ei 5-ffim With Aub $vitch, Erd plate mo||rt type: t{CDpxZ6f s-6ffiI& Nole: This diagram is ior D-A7 or D-AB type. ( ): with D-F7 or D-J7 type.

Air Cylinder NCX2 Series Slide Unit

415-500 ltcx2Ors-700 Wi[| Auto switch, rhlsing mou type: NCDBX2ei 5-ffim With Aub $vitch, Erd plate mo||rt type: t{CDpxZ6f s-6ffiI& Nole: This diagram is ior D-A7 or D-AB type. ( ): with D-F7 or D-J7 type.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Dimensions for Mounting of Auto Switch D-Z7/Z8 (Reed switch) D-Y5, D-Y6, D-Y7 (Solid state switch) A Dimension Bore size (mm) Auto switch model 10 15 20 25 32 6 A D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV D-Y7NW/Y7PW/Y7BW D-Y7BAL D-Z7, D-Z8 0.2 0.7 6.0 0.7 6.5 1.2 Mounting of Auto Switch When mounting and securing auto switches, they should be inserted into the cylinders switch

FSQ seies

;ffi|-w- Series RSDO Auto Switch Mounting Position (Stroke End) / Mounting Height (i32 60 D-A7, D-A8 D-A7, D-A8 A= @ ,BE6E-D-A7H, D-A8OH D-F7, D-J79 D.F79W, D-J79W D-A7H, D-A8OH D-F7, DJ79 D-F79W, D.l79W Connector type D-A73C, D-A80C D-J79C Connector type D-473C, D-A80C D-J79C D-A79W, D-F7;WV D-F7 trV D-A79W, D-F/SWV D-F7E]V Auto switch mounting position Auto switch mounting height 27.O 37.5

Air Cylinder RSQ Series Stopper Cylinder

;ffi|-w- Series RSDO Auto Switch Mounting Position (Stroke End) / Mounting Height (i32 60 D-A7, D-A8 D-A7, D-A8 A= @ ,BE6E-D-A7H, D-A8OH D-F7, D-J79 D.F79W, D-J79W D-A7H, D-A8OH D-F7, DJ79 D-F79W, D.l79W Connector type D-A73C, D-A80C D-J79C Connector type D-473C, D-A80C D-J79C D-A79W, D-F7;WV D-F7 trV D-A79W, D-F/SWV D-F7E]V Auto switch mounting position Auto switch mounting height 27.O

D-F6N/D-F6P/D-F6B

/A8, D-A7H/A80H, D-A73C, A80C, D-C7/C8, D-C73C/C80C, D-E7A, E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, D-A79W The auto switches above do not have a built-in contact protection circuit.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

D-F9N D-F9P D-F9B D-F9G D-F9H N.C. (B contact) N.O. (A contact) Contact Electrical entry In-line Wiring type 3 wire 3 wire 2 wire Output type PNP NPN NPN PNP 24VDC relay, PLC IC circuit, Relay, PLC IC circuit, Relay, PLC Applicable load Auto switch internal circuits Lead wire colors inside [ ] are those prior to conformity with IEC standards.

MHY2/MHW2

Switch return position (OFF) D-F9N D-F9B D-F9BA D-F9NW D-F9NV D-F9BV D-F9NWV MHS O MHY2-10D 3 8 13 6 1 1 8 S Hysteresis O MHY2-16D 3 8 13 7 1 1 8 S MHC2 Switch operating position (ON) O Hysteresis MHY2-20D 5 10 4 5 S Switch operating position (ON) MHT2 O Switch return position (OFF) MHY2-25D 3 9 3 3 S MHY2 D-F9NW(V) D-F9BA MHW2 D-F9N(V) D-F9B(V) Red light at ON Red light at ON Green

-fl Seies

qn D N coreclor.

Compact Cylinder

D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.