SMC Corporation of America
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A standard related to the protection E Enclosure (IP) from external objects (hands, steel ball, steel wire, dust, water, etc.) applied to the product. FE Abbreviation of functional earth. F Fieldbus The protocol that uses digital communication to exchange signals between field equipment (instruments and actuators) running on site and a PLC.

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

Note2:See specification table for refrigerant used in th e product. 6.2 Refrigerant with GWP reference 6 2 IDF100F~150F-W IDX-OM-M051 Air Dryer 6. Reference Heavy duty auto drain 6.3 Outer dimensions [IDF100F-30-W] Ball valve (O.D.10, Length approx. 2m) is also available.)

When error occurs Precautions W hen an e rror occurs,take the following steps. The tenSile strength of the cord is 49N (Skgf). Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.

6 e @1 @1 e tValve guide tValve guide Working principle (For IR2000) When the setting knob is turned, the nozzle is closed by the flapper allowing the supply air that flows in from the upstream side to pass through the fixed throttle.

Description of LEDs q w e No. Description LED Color Contents q Power supply display PWR Green Lights up when the power supply is turned on. w Discharge/Irregular high voltage display ION/HV Green/Red Lights up when static electricity is discharged. (Green)/Lights up if an abnormal high voltage discharge occurs.

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

(Station 5) Type of actuation Light/Surge voltage suppressor 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Nil E Yes Without light, with surge voltage suppressor Prefix the asterisk to the part nos. of the solenoid valve, etc.

E 21 S LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Individual exhaust spacer Gasket Spacer E M2.5 x 36 (2 pcs.)

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95