VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Compact Vacuum Ejector Series ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Free Mount Cylinder

) 51 (61) 55 (65) 59 (69) 63 (73) -XC34 C(D)UK10-D 60 (85) 66 (96) 72 (102) 78 (108) 84 (114) 90 (120) C(D)UK16-D 113 (147) 124 (164) 136 (176) 148 (188) 160 (200) 172 (211) 195 (235) 219 (260) C(D)UK20-D Precautions 212 (266) 229 (288) 246 (305) 263 (322) 280 (339) 297 (356) 335 (390) 370 (424) C(D)UK25-D Be sure to read before handling.

2–4

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5

VQ5000

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

ZP

A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPR Replacement Parts

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

EXxx-OMV0017-D

Information TAG Max. 15 characters Available -99No.EX##-OMV0017-D 7. Troubleshooting Problem no.

Compact Cylinder with Solenoid Valve/

D-A90(V) OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT() Blue Weight (g) D-A93(V) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Brown OUT (+) Brown 41 Lead wire length (m) 0.5 6 6 6 6 8 8 Contact protection box CD-P11 CD-P12 Resistor 3 30 30 30 30 41 Reed switch Zener diode Dimensions (mm) OUT () Blue Blue D-A90/D-A93/D-A96 2 2.8 4.5 2.7 D-A96(V) DC (+) Brown 4 LED

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

AC Servo Motor Driver (Pulse input type)

Configuration Minimum equipment and wiring requirements to get started 1 Provided Ex) 200 V AC (*1) by customer 6 5 Provided 1 by customer 7 2 3 (-) PC 1 2 4 (+) 8 C D 11 21 9 U 2 Electric Actuators Ex) LEF V W Provided by customer 3 10 (*1) Refer to LECSB Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSB*-S* 2 Motor cable LE-CSM-*** 3 Encoder cable LE-CSE-

Vacuum Pad

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

Heavy Duty Stopper Cylinder Series RSH/RS1H

, D-Z76, D-Z80 Auto Switch Specifications Grommet D-Z7 (with indicator light) D-Z73 D-Z76 Auto switch part no.

EXxx-OMN0027CN

175g 170g 1 -31No.EX-OMN0027CN-D EX600-ED2 -32No.EX-OMN0027CN-D EX600-ED2-2 -33No.EX-OMN0027CN-D EX600-ED2-3 -34No.EX-OMN0027CN-D EX600-ED3 EX600-ED3-2 -35No.EX-OMN0027CN-D EX600-ED3-3 -36No.EX-OMN0027CN-D EX600-ED4/ED5 -37No.EX-OMN0027CN-D EX600-ED4/ED5-2 -38No.EX-OMN0027CN-D EX600-ED4/ED5-3 -39No.EX-OMN0027CN-D EX600-EU1 EX600-EU1-2 -40No.EX-OMN0027CN-D EX600-EU1-3 -41No.EX-OMN0027CN-D