Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Accessories (Optional) Hydraulic Fluid Compatibility Cushion Strokes (for Front & Rear) Bore size (mm) Effective cushion stroke (mm) 15 15 17 20 20 20 22 Knuckle bracket, Single knuckle Double knuckle, Bracket pin Knuckle pin Rod boot Hydraulic fluid Compatibility 40 50 63 80 100 125 160 Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible O/W hydraulic fluid Compatible

LEF-OM006xx

6 7 8 < -> LEFS40 LEFS40 10 60 60 10 50 50 W(kg) W(kg) W(kg) W(kg) 40 40 30 30 20 20 10 20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90

MXS Series Air Slide Table

When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work

SMC Pneumatic Clean Series

W X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

NCA1

, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order MOUNTING BORE STROKE SUFFIX NCDA1 W Ex: NCDA1WB 150-400 Auto-switch capable Double Rod Double Rod Basic Type NC A1WB (in) Bore (in) MM KK A AA B C D DD E EA EE G K LD P R WF Y ZM XT SD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Series MXP Precision Air Slide Table

10 J 6 Mounting base side B D 10 9.5 Across AA MXP10-20 Without magnet and switch rail 2-M30.5, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 2.5 4.7 6-M30.5 15 15 4 deep L (mm) Model G H J K L M N S V W Z MXP10-10 8 32 52.4 20 20 21 6.5 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55%

Refrigerated Air Dryers

, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15

HRL

Power consumption P: 20 [kW] Q = P = 20 [kW] Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = V: Power supply voltage P 24 [kW] Power consumption e Derive the heat generation amount from the output. Output (shaft power, etc.) W: 13 [kW] w Derive the heat generation amount from the power supply output.

A

T O O R D E R A I R F I LT E R (N)AF800-12 (1 14) (N)AF800-14 (1 12) (N)AF900-20 (2) H O W T O O R D E R A I R F I LT E R W I T H A U T O D R A I N (N)AF811-12 (1 14) (N)AF811-14 (1 12) (N)AF911-20 (2) ACCESSORIES A I R F I LT E R Filter Elements 11345-5B NAF800 11352-5B NAF900 Note) (N)AF AF Japanese NAF North American Courtesy of Steven Engineering, Inc. !

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

MXW Series Long Stroke Slide Table

My Mp W W L2 B2 W C2: Correction value for moment center distance L1 A2 L3 C2 My (mm) A2: Correction value for moment center distance MXW 8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 B2: Correction value for moment center distance (mm) Mr (mm) W Mp 10 10 14 20 28 W MXW 8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 W Dynamic moment Moment due to impact of load at end

CQS

Type/Without Auto Switch Graph (4) Anti-lateral Load Type/With Auto Switch D-X 25 Allowable lateral load W (N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH