Modular Type Air Filters Series AF

Symbol 10 20 30 40 50 60 Body size Description Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) Mounting a Without mounting option With bracket + Semi-standard Option Nil C D Float type auto drain b Without auto drain Float type auto drain (N.C.)

Low Friction Cylinders Series MQ

I NA D J A F N2 N1 MM S + Stroke F H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc 1/8 13 NPT 1/8 25 G 1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc 1/8 13

AW

set nut (for panel fitting) Mounting a + Nil C D Without auto drain Float type auto drain (N.C.)

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Microspeed Cylinder

Also note that a current greater than that specified will damage a light emitting diode and it will no longer operate. Applicable models: D-A73, A73H, A73C, C73, C73C, D-97, 93A, A93, A93V, D-A33A, A34A, A44A, D-B53, B54 2) However, in the case of a 2 color indicator type auto switch (D-A79W, B59W), note that the switch will be in a normally ON condition if connections are reversed.

4/5 Port Air Operated Valve Series SYJA3000

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

VQ5000

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 14.4 10 3.4 01: R1/8 N01: NPT1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 833 Low Differential Pressure Sensor Series PSE550 Series Rated pressure

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Calculate the moment of inertia for A and B separately as shown in the figures on the right. A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com c B part e f d 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

/40/50/63 D-X 20B A Data Solid State Switch D-Y59 , D-Y69 , D-Y7P(V) A B A B Reed Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) 63 50 40 32 25 Mounting position 40 32 25 Mounting position 63 50 40 32 25 Mounting position A A 229.5 184.5 139.5 278.5 229.5 184.5 139.5 323.5 A 323.5 278.5 229.5 184.5 139.5 B B 110.5 95.5 180.5 121.5 110.5 95.5 180.5 136.5 B 136.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc(PT)1/8

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

5 15-9-59 Series AS-FM Dimensions: Elbow Type M5 type U10/32 type Applicable tubing O.D. d Applicable tubing O.D. d H H (Hexagon width across flats) (Hexagon width across flats) A L4 A D1 L4 D1 L3 L3 M1 M1 T D2 L1 D2 L1 T L2 L2 Metric Size A L4 Weight (g) d T Model M1 D2 L2 L3 D1 L1 H Min. Min. Max. Max.

5 Port Solenoid Valve SY Series

10.2 Manual override 22.2 (For manifold mounting) 21.4 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 69.4 [71.6] (35) (27) (For mounting) 23.2 (3.2) (Light/surge voltage suppressor) C6:33.6 N7:37.4 7.5 (3.2) N7: 37.4 C6: 33.6 (35.5) (32) + 25 18.5 10 0.8 16.9 13.1 SY3120-M5(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5

17

Proper Mounting Position Applicable Cylinder Series: MGP (mm) Auto Switch Mounting Height (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV D-P3DW D-A9 D-A9V D-P3DW Bore size (mm) Bore size (mm) A 7.5 10.5 12.5 11.5 12.5 15.5 14.5 16.5 18 21.5 B 9.5 10.5 12.5 14 13 16.5 17 20 26 32.5 A 3.5 6.5 8.5 7.5 8.5 11.5 10.5

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.