Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

CL

D C B H d Tube I.D.

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

X 0.8, Rc (PT) 1/8, C4 (4 One-touch fitting) C6 (6 One-touch fitting) M5 X 0.8 Rc (PT)1/8 Port size M5 X 0.8 A port VZ M5 X 0.8 X port (1) M5 X 0.8 M5 X 0.8 VT Body ported style SYJ5l2/SYJ5l2R 3.4 (0.19) Valve effective area (mm2)(Cv) (2) VT M5: 3.3 (0.18) 1/8: 4.8 (0.27) C4, C6: 3.8 (0.21) Base mounted style SYJ5l4/SYJ5l4R M5: 3.8 (0.21) 1/8: 4.7 (0.26) VP Note 1) Only for external pilot

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

3 Port Air Operated Valve

(Values at the initial period) Flow Rate Characteristics/Weight C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Weight (g) Note) Port size Model C [dm 3/(sbar)] b Cv 3.5 4.2 7.9 8.9 11.9 15.1 1/8 1/4 1/4 3/8 3/8 1/2 0.26 0.22 0.21 0.16 0.21 0.21 0.8 1.0 1.8 2.2 2.7 3.6 3.6 4.2 7.2 8.9 11.8 15.3 0.26 0.23 0.27 0.20 0.20 0.22 0.9 1.0 1.8 2.1 2.7 3.7 118 114 237 229 501 484 VPA342 VPA542 VPA742

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .07716 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .38580 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .44092 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .57739 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .08157 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .45595 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JD, ZSE30 1/8 PORTED, .18738 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .62463 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JD, ZSE30 1/8 PORTED, .15725 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .44092 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .36827 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator