Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Head Side Trunnion Style Rod end lock/-R Bore size (mm) Z (Head side trunnion) ZZ (Head side trunnion) With rod boot With rod boot Without rod boot Without rod boot 145 + l 124 + l 20 104 125 152 + l 131 + l 25 109 130 Head side trunnion style: CBG1T (Rod end lock -R only) 157 + l 133 + l 32 111 135 175(182) + l 147(154) + l 40 127(134) 155(162) 200(211) + l 168(179) + l 50 148(159) 180(191

CNS

Bore size J Nylon tarpaulin Rod boot 125 125 mm K Heat resistant tarpaulin 140 140 mm Nil With cushion in both ends 160 160 mm N Without cushion Cylinder stroke (mm) Refer to Maximum Stroke on page 9-8-9. Cushion R With rod bumper H With head bumper Built-in Magnet Cylinder Model In the case of one side, it is in the lock side.

CL

Mounting style Basic style Foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T CNS CLS With rod boot/cushion Tubing material J K N R H Nil Nylon tarpaulin Heat resistant tarpaulin Without cushion With rod bumper With head cushion With cushion on both ends Tubing material Aluminum tube Aluminum tube Steel tube

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (Single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (Single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Cylinder with Lock Series CNS

Nil D Double clevis type J Nylon tarpaulin S 1 pc. T Center trunnion type Rod boot K Heat resistant tarpaulin n "n" pcs. Bore size Rubber bumper at both ends Nil N 125 Without bumpers 125mm Internal magnet cylinder part numbers Cushion R 140 With front bumper 140mm H 160 Cylinder stroke (mm) Refer to the maximum stroke table on page 2.

Compact 5-Port Solenoid Valve

For EX600/EX250 pp. 63, 77, 119 1 3 5 S6 S JJ5SY 10 G P, E port entry, SUP/EXH block assembly P, E port entry External pilot U side (2 to 10 stations) G D side (2 to 10 stations) H Both sides (2 to 24 stations) J How to Order Valves JSY T 0 0 5 1 R 3 5 R JSY 0 0 5 Coil type (See below.)

IDU/IDF

E Q P N M L K J I H G F D C B A Port size Model 71 50 90 700 700 600 356 328 398 219 642 63 445 70 1235 1155 750 300 R 1 IDU22C1/22C 112 50 90 780 776 680 416 388 463 269 722 68 550 136 1350 1260 830 360 R 1 1/2 IDU37C1/37C 87 50 95 800 800 700 461 433 508 267 722 68 530 155 1440 1340 850 405 R 2 IDU55C 87 50 95 800 800 700 481 453 528 317 722 68 530 220 1575 1475 850 425 R 2 IDU75C : Power

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

Series 10-, 21- AW-B Filter Regulator

R.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Environment

0 i o e r t q u !1 !2 !3 !

Title not found

.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

LEC-OM02904

(b) 1) Vb[V] 2) (Ib) Ib = Vb R [A] 3) (E) L lb2 E = 2 [J] 4) (Vi) (Ib)(Vi)(E) (Vi)[V](Vs)[V]Vi ViVs 5) () () = E Vi lb [S] 6) ()N (Ip) (Ip)(Ib) Ip/IbN[] (4) 13 3 13. 13.1.2 ( ) () LE--B S5 S6 S7 S8 50W 100W 200W 400W (1) () (4) DC 24 V 0 -10% [W] at 20 6.3 7.9 (6) [] 91.0 73.0 (6) [H] 0.15 0.18 [N m] 0.32 1.3 (2) [s] 0.03 0.03 (2) [s] 0.01 0.02 1 [J] 5.6 22 [J] 56 220 (5

XM, XY

type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177 B 80 100 117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -