Proposals for Energy Saving 1 r t y !2 e !4 !5 !4 !5 !
MM Air release e D E BB FY Width across flats G Air release NA T FT NB l C 10 f SS + Q + l + Stroke S + Stroke K F MA B SS + Stroke A FX ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB NA NB P R S T FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 32 15 37 31 3/8 39 141 11 11 11 88 40 109 182 52 21.5 15 25 to 1400 1/3.5 stroke 40
Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread
Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread
C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR D C E GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11
(b) () () t t [Hz] [Hz] [Hz] [Hz] 3. 7.1.6 3 4.5Hz2250Hz [Pr. PB45 ] ()150ms (1) t t 7 12 7. (2) Pr. PB45 ] [Hz] [Pr.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
[Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-3 6.4.1 Optional Accessories
Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8
t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.
Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.
ryL-I Grommel MType I l i _--Plug Connector , , t . } I t ' l 1 l' ",l' t'ri I i 1 ' v . . } 6 i l 1 ;-'ft li Lrype ril I 1 "':::*"'ij i i Slotted locking Type I Non-Locking Push Type 11 1 l L _ _ _ _ _ _ _ _ _ _ _ _ _ . 1 -J Air Operated Valve : NVJA Base Mounted Type 3 Port Air Operated Valves Series: NVJA3OO Body Ported Type -fvi-tu *lT-T\-t= l-L\++ tut*!
ryL-I Grommel MType I l i _--Plug Connector , , t . } I t ' l 1 l' ",l' t'ri I i 1 ' v . . } 6 i l 1 ;-'ft li Lrype ril I 1 "':::*"'ij i i Slotted locking Type I Non-Locking Push Type 11 1 l L _ _ _ _ _ _ _ _ _ _ _ _ _ . 1 -J Air Operated Valve : NVJA Base Mounted Type 3 Port Air Operated Valves Series: NVJA3OO Body Ported Type -fvi-tu *lT-T\-t= l-L\++ tut*!
ryL-I Grommel MType I l i _--Plug Connector , , t . } I t ' l 1 l' ",l' t'ri I i 1 ' v . . } 6 i l 1 ;-'ft li Lrype ril I 1 "':::*"'ij i i Slotted locking Type I Non-Locking Push Type 11 1 l L _ _ _ _ _ _ _ _ _ _ _ _ _ . 1 -J Air Operated Valve : NVJA Base Mounted Type 3 Port Air Operated Valves Series: NVJA3OO Body Ported Type -fvi-tu *lT-T\-t= l-L\++ tut*!
C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.
T) V N M V LVQ30S, LVQ50S C B A D A B SMC U (Max. T) Z N M LVQ40S, LVQ60S C B A D (Max.
Dimensions Panel mount union reducing: LQ1P-R Panel thickness (Max. t) J W1 W2 M1 M2 B side A side H2 H1 E2 E1 L1 L2 Class 4 and 5 Panel hole diameter K Metric Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.
Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.