11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

(Plug: M-5P) 4.2 25 24 8.5 3 0 +0.030 depth 3 A 3 0 +0.030depth 3 1.5 19 220.05 4-M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum suction port M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

M-5T M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Weight: 3.5 g Weight: 4.2 g Universal Elbow: M-5UL Universal Tee: M-5UT Width across flats 7 2 x M5 x 0.8 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 2.4 mm2 Effective area: 2.4 mm2 Weight: 5.3 g Weight: 4.8 g Extension Fitting: M-5J Nipple: M-5N Width across flats 7 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x

Angle Seat Valve /

4000 Flow rate Q [L/min] How to read the graph The sonic range pressure to generate a flow rate of 4000 L/min (ANR) is P1 0.4 MPa for the VXB215A D(H).

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

CV/MVGQ

Grommet L plug connector M plug connector DIN terminal G L M D CE2 ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

VKF300

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

CQM

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F79F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F -X Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mounting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 20Data D-F9W, D-F9WV D-F9BAL 5.5 3 4 5 5.5 5.5 5.5 Switch mounting

EX510

(Blinks at 0.4 second intervals) Light is turned off. 6 5 4 3 2 1 ON 10 9 8 7 6 5 4 3 2 1 ON ON ON L ERR L RUN L ERR PWR(V) PWR COM C COM D COM A COM B INPUT When COM A to D are receiving data. When COM A to D are not receiving data. Light is turned on. Light is turned off. COM A to D Input unit (Input device) is connected and will illuminate when communication is working properly.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

SFOD-OMT0010

8 B A-6 (Only "Robotic type cable" is 3 Signal name Terminal (d) number available) Lock (+) B-1 Red 4 Lock (-) A-1 Black 5 Sensor (+) B-3 Brown 1 Sensor (-) A-3 Blue 2 Actuator side Controller side 2 1 (5.5) (14) (a) (6.3) A1 B 5 6 (b) (17.7) (14.2) 1 A6 B6 (c) (10.2) 2 1 B1 A1 B3 A3 (18) (5.7) 15 16 (d) L (11) (30.7) 83 No.SFOD-OMT0010-B 10.7 ParallelI/O cable J X C C 2 Cable length [L]

End Lock Cylinder Series CBG1

+ l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202) 227 (239) 245 + l 303.5 + l 239 (253) + l 297.5 (311.5) + l 80 236 294.5 230 (244) 288.5 (302.5) 253 + l 329.5 + l 247 (261) + l 323.5 (337.5) + l 100 244 320.5 238

KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

Antistatic One-touch Fittings Series KA

M5, M6 D L A M Part No.

ChemicalThermo-con

or less 200 [mg/L] or less 100 [mg/L] or less 200 [mg/L] or less 150 [mg/L] or less 50 [mg/L] or less 1.0 [mg/L] or less 0.3 [mg/L] or less Should not be detected. 1.0 [mg/L] or less 0.3 [mg/L] or less 4.0 [mg/L] or less Standard item Reference item Electrical conductivity should be 100 [S/cm] or more. 2.

Shock Absorbers and Rate Controls

Conlreriior (lbs.l Bore Size tir.l (otolog l{0. (l|odel) D!nping Dire(tion ADA'05 I , ( o r I o n d C .9S ,l 2,500 1,500 1.100,0!0 9.35 7.10 ADATI (l l ( o r T o n d ( .98 4 2,500 2,500 1,400,000 4.4 13.35 9.10 ADATI5 l ( o r l o n d ( .9S 6 2.500 2,500 1,800,000 5.1 17.35 .l0 ADA72O l ( o r l u n d ( .98 I ?,500 2,500 2.100,000 ?

reduces flow setting time

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

New

C37 20A 3/4 20 D 200 VAC N.O. Stainless steel E 230 VAC 6 D K L N.C. N.O.