Vacuum Pad: Ball Joint Type

-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F 10-0-A10 (With buffer/One-touch fitting) ZPT F 10-01-A14 (With buffer/Female thread) Applicable tubing O.D.

4-channel Flow Monitor (Remote type monitor unit)

Normal condition: Flow display which is converted in atmospheric pressure at 0 C. 5: Total accuracy when used with applicable sensor. -37No.PF-OMH0003-F PF2W20 Model PF2W20 PF2W504(T) PF2W520(T) PF2W540(T) PF2W511(T) Applicable sensor PF3W504 PF3W520 PF3W540 PF3W511 Rated flow range 0.5 to 4.0 2 to 16 5 to 40 10 to 100 L/min L/min L/min L/min Instantaneous Setting/display flow range 1 0.35

AWM20 to AWM40

t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

AWM20 to AWM40

t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH T-SPACERIS10T-20-D to IS10T-60-D T 30 IS10 D Symbol Description Body size 20 30 40 50 60 Nil Rc Pipe thread type NPT G + 01 1/8 02 1/4 03 Port size 3/8 04 1/2 06 3/4 + Nil 0.1 to 0.4MPa a Set pressure range 6Note2) 0.1 to 0.6MPa + Semi-standard Nil 0.5 3 b Lead wire length Z 5 + Nil MPa c Pressure unit of the scale plate P MPa/psi dual scale Note 1) A semi-standard

One-touch Fittings

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1

IDG

t Plug } IN OUT OUT IN q o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

VFM300

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

ASP

Made to Order Lubricant: Vaseline X12 547 Series ASP How to Order ASP 3 30F 01 06 S Made to Order Lubricant: Vaseline X12 Ex.) ASP330F-01-06S-X12 With seal Pilot check valve Body size Applicable tubing O.D.

VEX1

Example: VEX1333-03 G36-4-01 843

Profi-E

Set t i ng at t he t i m e of shi pm ent i s 01. 6 4 6 4 5 5 Set t i ng t he t erm i nat or Set PRO FI BU S com m uni cat i on l i ne t erm i nat or.

CC-Link-E

Af t er set t i ng t he sw i t ch, t i ght en t he sw i t ch cover i n t he reverse order of t he above procedure. ( Ti ght eni ng t orque 0. 6 t o 0. 8N m ) Setting of node address and com m unication rate Pl ease execut e t he set t i ng of node address and t ransm i ssi on rat e w i t h t he di p sw i t ch. 1 2 3 4 5 6 7 8 9 10 SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 BS4 BS2 BS1 Tabl

Speed Controller: Standard Type Series AS In-line Type 1

Description Model AS2000 AS3000 Valve O-ring Spring 14283 14284 14282 143022 143021 143023 e t y Electroless nickel plated Construction: AS4000 Component Parts No. Description Material Note Body Cap Chromated Zinc chromated 4 x 0.7 x 8 JIS B 2805 Nominal 6 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR q w e r t y u i !

ZQ-OM01301

Vacuum pressure switch 5.1 Internal Circuit and Wiring Examples 5.2.1 Vacuum pressure switch NPN (2 output) PNP (2 output) Brown DC() Brown DC() DC (+) DC (+) Lord Black OUT1 Black OUT1 Loa d Black OUT1 Black OUT1 Main circuit Main circuit Lord M ai n ci rc ui t M ai n ci rc ui t Lord Loa Loa d DC12 DC12 d to to OUT2 White OUT2 White OUT2 OUT2 24V 24V Lord Loa FUNC FUNC d Blue DC() DC

PSxx-OMU0008CN

D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) F.S. ( 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] R.D.

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

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Digital Flow Switch (Integrated display type)

Switch output T Temperature characteristics Indicates the change in the display value and analogue output caused by ambient temperature changes. U Unit selection function A function to select display units other than the international unit (SI unit) specified in the new Japanese measurement law. Flow can only be displayed by SI units in Japan.