SMC Corporation of America
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Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Bonnet Standard Panel Installation 3) Code Pressure

3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage

socket head universal male elbow Universal female elbow Female elbow Double universal male elbow Triple universal male elbow Branch universal male elbow Double branch universal male elbow Triple branch universal male elbow Extended male elbow Male branch tee Male run tee Branch Y Different diameter plug-in Y Bulkhead union Bulkhead connector Bulkhead union elbow Adaptor H S F L K V VS VF

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solens 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solens 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Error Indication 4 White (IN: 1 to 5 V) approx. 1 s This function is to display error location and content when a problem or an error occurs. Mounting Mount the optional bracket or panel mount adapter to the monitor. Measurement mode Check that the above preparation has been performed correctly, then part A shown should be pressed in by hand to make temporary connection.

PSE3 0(T) PSE3 1(T) NPN open collector output: 2 outputs NPN open collector output: 2 outputs Max. 30 V, 80 mA Residual voltage 1 V or less Max. 30 V, 80 mA Residual voltage 1 V or less Analogue output: 1 to 5 V Output impedance: Approx. 1 k Analogue output: 4 to 20 mA Max. load impedance: 300 (12 VDC) 600 (24 VDC) Min. load impedance: 50 PSE3 2(T) PSE3 3(T) Auto shift input Voltage

Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.

(DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m 1 AC100V50/60Hz )V111 CE L -Q 2 AC200V50/60Hz LN L AC110V50/60Hz LO 3 (AC115V50/60Hz) M 4 AC220V50/60Hz MN M (AC230V50/60Hz) MO *WDC *CE DC WO M8 1 W *M8 P13P14 *P13P14 5 D V115 5 DC24V 6 DC12V S () 1 AC100V50/60Hz Z () *DOZYOZ *AC S 2 AC200V50/60Hz 3 AC110V50/60Hz (AC115V50

Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.

Hook Switch ON Switch OFF Time [s] NOTE The direct current power supply to be used should be UL approved as follows. Circuit (of class 2) which is of maximum 30 Vrms (42.4 V peak), with UL 1310 class 2 power supply unit or UL 1585 class 2 transformer. The product is a approved product only if it has a mark on the body.

005 PCW 01 005 V Lead wire length Lead wire length Symbol 005 010 015 020 030 050 Lead wire length Symbol 005 010 015 020 030 050 Lead wire length 0.5 m 1 m 1.5 m 2 m 3 m 5 m 0.5 m 1 m 1.5 m 2 m 3 m 5 m Contact your SMC sales representative regarding connector cables with lead wire lengths other than those in the table above.

(example: If the Pressure switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5 (V) x 1 (M)/(1 (k) + 1 (M)) 4.995 (V), and there is an error of approximate 0.005 V). Output impedance Operation mode Either hysteresis mode or window comparator mode can be selected.

Basic type Pilot Solenoid Valve Specifications VEX5511/5711/5911/5501/5701/5901 SF4--20 Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Pilot valve Model Electrical entry Coil rated voltage (V) AC (50/60Hz) DC Allowable voltage 100 V, 200 V, Other (Option) 24 V, Other (Option) 15 to +10% of rated voltage Inrush AC Holding DC 5.6 VA (50Hz), 5.0 VA (60Hz) 3.4 VA (50Hz

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Note Bracket VK300-43-2A With screw Body ported VK332 1 G M5 1 G 01 VK334 Base mounted CE-compliant Q CE-compliant Nil Port size Note) Applicable only for DIN terminal type 01 (With sub-plate) Nil Without sub-plate 1 8 Valve option Light/Surge voltage suppressor CE-compliant Nil V Y W E Standard type For vacuum Nil None S With surge voltage suppressor For low wattage For vacuum/low wattage