Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

SYJ3000/5000/7000

port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5

REA/REB

Note 2) 15 has internal magnets in the body. 65 Series REBR Dimensions/15, 25, 32 Operating direction Operating direction B Operating direction A A K W HB HB HC X Piping port P (plug) Operating direction A Piping port P (plug) Operating direction B N H HA Y T CB 8-MM thread depth M HT HP 4-counter bore B Counter bore depth C HP L 4-J Effective thread length E TC X F WP WP GW GP QW PW D 4-

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Y Motorless LAT LZ LC3F2 129 LEJ Series AC Servo Motor Clean Room Specification Table Accuracy (Reference Value) A side B side Model Traveling parallelism [mm] (Every 300 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side D side w q LEJl40 0.05 0.03 C side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.

MQQ

I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

CNA

X H X Y BN N T LX h + l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke B Long Stroke When stroke exceeds 1000 mm, mount tie-rod support ring.

CNA

X H X Y BN N T LX h + l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke B Long Stroke When stroke exceeds 1000 mm, mount tie-rod support ring.

Pneumatic Transfer System Series MF

C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581

MY2

Wn Weight mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88kg 65mm 0mm 5mm 111 Wb 4.35kg 150mm 0mm 42.5mm Y 210 Y Wc 0.795kg 150mm 111mm 42.5mm Wd 1.5kg 150mm 210mm 42.5mm n = a, b, c, d 3 Composite center of gravity calculation m3 = mn = 0.88 + 4.35 + 0.795 + 1.5 = 7.525kg 1 m3 X = x (mn x xn) 1 7.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.5 x 150) = 140.1mm 1 m3 Y = x (mn x yn) 1 7.525

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A B Without auto switch With auto switch (All dimensions are common expect "A" and "B".)

LJ1H

(B contact) 2 pcs.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

MGC

' Component Parts Description Rod cover Tube cover Piston Piston rod Bushing Cushion ring A Cushion ring B Magnet Seal retainer Cushion valve Packing retainer Lock nut Wear ring Rod end nut Cushion seal A Cushion seal B Piston gasket Description Slide bearing Ball bushing bearing No. q w e r t y u i o !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.