Cylinder with lock

Operating environment P.12 2-5. Speed control P.13 2-6. Cushion P.13 2-7. Directional control P.13 2-8. Pneumatic circuit P.14 2-9. Adjustment and Operation P.15 3. How to use P.16 3-1. Usage P.16 3-2. Lock release mechanism P.17 3-3. Auto switch P.19 3-4. Wiring method and examples of auto switches P.21 4. Maintenance P.22 4-1. Consumable parts P.22 4-1-1. Seal kit P.22 4-1-2.

Cylinder with lock

Operating environment P.12 2-5. Speed control P.13 2-6. Cushion P.13 2-7. Directional control P.13 2-8. Pneumatic circuit P.14 2-9. Adjustment and Operation P.15 3. How to use P.16 3-1. Usage P.16 3-2. Lock release mechanism P.17 3-3. Auto switch P.19 3-4. Wiring method and examples of auto switches P.31 4. Maintenance P.32 4-1. Consumable parts P.32 4-1-1. Seal kit P.32 4-1-2.

Electric Actuator Triple Axis P&P Unit

T nuts provided by P/A.

HEC_001W-E

D a t a L e n g t h M O D E < 8 B i t s 5. Stop Bit Setting range : 1Bit,2Bits Indicated content : Stop bit(Ex. : 1Bit) Function : Sets stop bit for communication. S t o p B i t M O D E < 1 B i t 7.6.4Power supply OFF The power switch is turned off. When the power supply is restarted after turned off once, keep time interval at least 3sec.

A_HEC-OM-I009

Parity Bit P a r i t y B i t M O D E < W i t h o u t Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. 4. Data Length D a t a L e n g t h M O D E < 8 B i t s Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication. 5.

VEX1

h Grommet terminal i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,

CLS

washer A MLGP Specially treated (180, 200, 250) r t y u i o !

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

CRQ2

The rotation angle can be adjusted between 90 to 190. n o ti r a a n t o g Rotation starting point 10 10 e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at a n t o g Rotation starting point End of rotation A A R e A Lmax Lmax Size 20 30 40 Lmax 24 27 31.5 Size 10 15 20 30 40 Size 20 30 40 Rotation starting point 15 18 24 27 31.5 24 27 31.5 10 End of rotation

KR

KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

ZP

K Hexagon width across flats 12 Hexagon width across flats 12 ZU ZL ZY ZQ ZF ZP ZCU AMJ Bellows Bellows A D E F N P A E F N P B B Y Y C C D Misc.

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

CQS

Refer to p.0-39 through 0-46 for Safety Instructions and common precautions. D-A9l, D-F9lWV D-F9 , D-F9lW D-F9N B P D-A9lV D-F9lV D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult SMC for shorter strokes than indicated in the table.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

58

Changeable Range of Tie Rod Length (mm) CS2 125 140 L B, F, G, C, D, T 12 20 Model Bore size 160 L B, F, G, C, D, T 12 21 L B, F, G, C, D, T 14 23 270 Mounting bracket M minimum M maximum Symbol Double Clevis Pin/Double Knuckle Pin with Split Pin and Flat Washer 5 -XC26 Flat washer was added to the double clevis type (a mounting type) or the double knuckle joint (an accessory).

HRX-OM-W002

Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 2 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 10 12 13 15 5 7 2 1 4 4 4 14

Prevents Micro-Bubbles

PA A B Suck back (single type) Suck back (unit type) P P P A A B B With indicator Description Material Parts list No.