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Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

Tube swaged J O int rTSJ) for use with Swagelok<l type fittings 1 Digital Pressure Switch Series ZSE6/ISE6 How to Order Vacuum pressure switch Positive pressure switch ZSE68 82 27 IL ISE68 Switch type L,.,., '",..

(ANR)) 4B 1B B AMF250 AMF650 AMF1000 1 4 0.1 MPa 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) 2B AMF350 AMF800/801 B 3 8 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361 10.04 (25s) 10.79 1274't 11.54 12.28 (293) (312) 13.03 (331) 13.78 14.53 {3s0) L (369) 15.24 $mhs lllUlff 300 0l|||m$io Base Mounted (Side Ported) lType 42 Manifold NVV3KF3-42-Stations-01 T inch (mm) L: Dimensions Base Mounted (Side Ported) lType 542 Manifold NVV3KF3-S42-Stations

(A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".

2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361 10.04 (25s) 10.79 1274't 11.54 12.28 (293) (312) 13.03 (331) 13.78 14.53 {3s0) L (369) 15.24 $mhs lllUlff 300 0l|||m$io Base Mounted (Side Ported) lType 42 Manifold NVV3KF3-42-Stations-01 T inch (mm) L: Dimensions Base Mounted (Side Ported) lType 542 Manifold NVV3KF3-S42-Stations

(ANR)) Air flow rate (l /min (ANR)) AMG550 3 4 B AMG250 1 4 B Max. flow line Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMG650 1 AMG350 3 8B B Max. flow line Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) 14-20-4 3 Water Separator Series AMG Construction AMG150 to AMG650 AMG850

,lodular type FFL Combinalion Recommended for control of pilot signal: NIT 200 ' OO 2G Elecko-pneumalic regulator Ref. catalog N8-01 HOW TO ORDER x x T I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04 4 kgf/cm'?

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

AME150 AME450 AME650 B 1 8B 1B 1 2 0.1 MPa 0.1 MPa 0.1 MPa Max. flow line Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

/min (ANR)) Air flow rate (l /min (ANR)) AMH550 AMH250 B B 3 4 1 4 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMH650 AMH350 B 1B 3 8 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) 0.5 Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow

Technical Data for Operation The instruction manuals should be read before using the Series CE1 scale cylinder and CEU1 3 point preset counter. 4.4-5 Stroke Reading Cylinder 12, 20, 32, 40, 50, 63 Series CE1 How to Order CE1 L 32 200 Mounting Number of auto switches Both ends tapped (standard) 2 Bore size B Auto switch S 1 12 20 32 40 50 63 12mm L F G D Without auto switch Foot 3 3 20mm

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -31- Recommended Value of acceleration time constant of Point table No.1 [LEY] LEY25

2 SET SUP DIN UP DOWN OUT UP ( ) ON/OFF SET ( ) DOWN ( ) ON/OFF SUP () OUT () DIN DIN / ON/OFF() ON () -14No.PS-OMR0001CN-J 2 (ISA3) ISA3-F ISA3-G ISA3-H (5 m ) 0.010.03 mm 0.020.15 mm 0.050.30 mm () 1 060 2 10300 2 30500 2 () 1 1 100200 kPa () 3 -20220 kPa 600 kPa 1.5 4 5 L/min 12 L/min 22 L/min DC24 V 10(p-p)10() 25 mA 1 (NPN PNP) 10 mA 26.4 V 1 V (10

min 12 L/min 22 L/min DC24 V 10(p-p)10() 25 mA 2 (NPN PNP) 10 mA 26.4 V 1 V (10 mA ) 2 LCD 3 7 (/) 6 7 () IP67 8 050 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 C 4 6 G1/8(ISO1179-1) F G1/8(ISO1179-1) -15No.PS-OMT0001CN-E 2 ISA3-F ISA3-G ISA3-H M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 8 6 5 m46 14 6 5 m 0.50 mm 1.00 mm(26 )