HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Pin Cylinders Series CJP2/CJP

Applicable bore size (mm) Applicable bore size (mm) A B L L1 L2 MM NX R1 R2 U A NDd9 NDH10 B L1 L2 MM NDH10 NX R1 R2 U Part no. Part no.

KF

(width across flats) Applicable tubing (mm) Effective area (mm2) Connection Weight (g) L4 d L2 L3 M A L1 Model thread R I.D.

MGZ Series

based on vertical mounting and speed of 500mm/s.

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.

AC Servo Motor Driver (SSCNET /H Type)

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -38- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

Compact and Lightweight

The standard bracket and silencer are not assembled with the product, but shipped together. 20 54.5 228 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L One-touch and screw-in connection ZK2 SUP. EXH. ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

48

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

CJP

A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

CJP

A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

Air Slide Table Series MXQ

Workpiece table mounting Mounting: Horizontal wall mounting Average speed: Va = 300 [mm/s] Load mass: W = 1 [kg] L1 = 10 mm L2 = 30 mm L3 = 30 mm Enumerate the operating conditions considering the mounting position and workpiece configuration.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ100 VQZ200 VQZ300 Proper tightening torque 0.13 to 0.19 Nm 0.25 to 0.35 Nm 0.5 to 0.7 Nm NL: Neon bulb R: Resister LED: Light emitting diode R: Resister NL R R LED Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit Part no. for One-touch fitting for 1(P) port and Silencer for 3(R) port (2) For 3(R) port (1) One-touch fitting for 1(P) port Silencer AN120-M5-S

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) P=10.5 13.5 (L3) 3 L2

Residual Pressure Release Valve

L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK 10 8 7 6 4 2 0 With One-touch fitting with a push button guard: KEB Release time S Release time of pressure in the cylinder Body (Red) Residual