For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Without connector) Note 1) Consult SMC for other voltages. 4.3-11 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Equation L1= (n1) X 29+49 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max.20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

X X D3 D1 Y L1 M1 M1 Applicable tubing O.D.: 3.2, 4, 6 1/8", 5/32" 2 x Applicable tubing O.D. d Front view Right side view Metric Size Model Applicable tubing O.D. d D1 Release button D2 D3 D4 D5 L1 L2 L3 L41 L5 L6 L7 L8 M1 W1 W2 X1 X2 Weight [g] X(X) Y Max.

Mechanically Jointed Rodless Cylinder Series MY2

Load mass kg Load mass kg m s m s Type of impact s m 1 2 m2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with

MY2

Piston speed mm/s Piston speed mm/s Piston speed mm/s 10 Mechanically Joint Type Rodless Cylinder Series MY2C Cam Follower Guide Type/16, 25, 40 How to Order Cam Follower Guide Type MY2 G 16 C 300 L F9N Number of auto switches Guide suffix C Cam follower guide Nil S n 2 pcs. 1 pc.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg m s m s Type of impact s m 1 2 m2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

upward mounting with a speed of 500 mm/s, use graph (2).

CLA

Stop Accuracy (Variation in control system is not included) (mm) Piston Speed (mm/sec) Type of locking SO 100 300 500 I 2 .0 Spring lock O .4 O .S 1.0 Air pressure lock Spring-Air pressure lock O .2 O .3 O .S 1.S Condition/load: 25% of thrust at Skgf/cm2 Solenoid valve: Mount on lock-port Max. piston speed: 500mm/sec If the application is within the allowable kinetic energy specified, the

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-14-13 13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic type (Air cushion) 2 pcs. 1 pc. n pcs.

17

, and the speed of 200 mm/s.

HRX-OM-Z002

Measurement range of Electric conductivity 0.1 to 48.0 S/cm Setting value range of Electric conductivity 0.5 to 45.0 S/cm Setting range of Electric conductivity hysteresis 0.1 to 10.0 S/cm *Default values are: "Set Electric conductivity: 25.0 S/cm", "Hysteresis: 0.5 S/cm".

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

XMD/XYD Series

Step 4 Step 5 O ring S valve M valve Needle seat (XLD-25) S valve seal assembly (XLD-40,50) S valve seal assembly (XLD-63,80) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring.

e-Rodless Actuator

Speed (mm/s) Speed (mm/s) Speed (mm/s) 6 e-Rodless Actuator Series E-MY2C Cam follower guide type/Nominal size: 16, 25 How to Order Cam follower guide type E-MY2C 16 N 100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP