LG1H

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

MXH

3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Vacuum System Peripherals:

17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series

CLS

15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 47 47 53 60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 1/2 1/2 3/4 3/4 3/4 1 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 M30 x 1.5 25 to 1000 3 5 30 46 161 78 18 110 146 128 16 114 64 110 M14 x 1.5 M30 x 1.5 30 to 1000 182 95 23 132 169

240

NS 20 20 30 30 40 40 50 60 60 LT 58 58 68 68 78 78 88 98 108 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 26 Compact Slide MXH Series Dimensions: 20 LT MXH MXH 20 31 MXS MXQ 14 LA LB J x M5 x 0.8 Depth 6.5 MXQ MXF 3 x M6 x 1.0 through 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) MXW Pilot hole dia 5.1 2 x 3 x 9.3 counterbore depth

IDU/IDF

-7 18 Three phase Single turn 30 IDF55C-3, 75C-3 IDU55C-3, 75C-3 200V (50Hz) 200 to 220V (60Hz) 220V (50Hz) 220 to 240V (60Hz) 4kVA 275 259 240 IDF-TR4000-5 14 380, 400, 415V (50Hz) 380 to 400, 400 to 415, 415 to 440V (60Hz) IDF55C-3, 75C-3 IDU55C-3, 75C-3 200V (50Hz) 200 to 220V (60Hz) 220 A 4-11 4kVA 355 299 320 IDF-TR4000-6 35 440, 460V (50Hz) 440 to 460, 460 to 500V (60Hz) IDF55C-3, 75C

Digital Flow Switches

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 20 For Water Digital Flow Switch/High Temperature Fluid Type Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.

Ionizer

Ion generation frequency Switch setting 1 Hz 3 Hz 5 Hz 10 Hz 15 Hz 20 Hz 30 Hz 60 Hz 0 1 2 3 4 5 6 7 Caution 7) Wiring of power supply cable Connect the dedicated power supply cable.

MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

2 Phase Stepper Motor/Without Motor Brake Series LXS

wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire Model Lead wire length (m) 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 Symbol N.O.

Table of Contents

Cable length (L) 1.5 m 3 m 5 m SOL.A SOL.B () () (+) (+) 8 6 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 4 stations Cable 20 core x 28AWG Triangle mark indicator position 7 5 3 1 2 4 6 8 SOL.A () () (+) (+) 19 17 5 stations SOL.B SOL.A () () (+) (+) 15 13 For other commercial connectors, use a 20 pins with strain relief conforming to MIL-C-83503. 6 stations SOL.B SOL.A () () (+) (+) 11 9 Connector

1

Method of Mounting Two Auto Switches at the Stroke End of a Cylinder for Strokes Less Than 20 mm Auto switch model Applicable strokes 15 mm stroke 20 mm stroke 15 6 3 A 6 A 20 0.5 D-M9m(V) D-M9mW(V) D-M9mA(V) 0.5 3 6 B 6 B The correct mounting position of the D-M9 is 3 mm from the end face of the switch holder (dimensions A and B).

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L1 L2 H M E A 11.5 LQ1L1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18 15 1/8" 10 11.5 LQ1L4C-M LQ1L4B-M LQ1L4A-M LQ1L3D-M LQ1L3C-M LQ1L3B-M LQ1L3A-M LQ1L2F-M LQ1L2E-M LQ1L2D-M LQ1L2C-M LQ1L2B-M LQ1L2A-M 1/8" 16.5 27 20.5 14 15 14.5 1/4" 1/4" 23 20 35 17 26.5 20 3/8" 3/8" 28 21 24 45 33 25 1/2" LQ1L4D-M LQ1L5D-M LQ1L5C-M

MB1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500

48

Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size

Digital Flow Switches, Series PF2A, Series PF2W

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 20 For Water Digital Flow Switch/High Temperature Fluid Type Series PF2W Refer to www.poweraire.com for details of products compatible with overseas standards.

One-touch Fittings Series KQ2

32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6 12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 11.11 14.29 17.46 12.7